Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-27T04:46:23.429Z Has data issue: false hasContentIssue false

Closed porosity aluminosilicate for electronic packaging applications

Published online by Cambridge University Press:  31 January 2011

S.L. Hietala
Affiliation:
UNM/NSF Center for Micro-Engineered Ceramics, University of New Mexico, Albuquerque, New Mexico 87131-6041
D.M. Smith
Affiliation:
UNM/NSF Center for Micro-Engineered Ceramics, University of New Mexico, Albuquerque, New Mexico 87131-6041
V.M. Hietala
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185
C.J. Brinker
Affiliation:
Sandia National Laboratories, Albuquerque, New Mexico 87185
Get access

Abstract

The electrical properties of sol-gel prepared aluminosilicate films were investigated for suitability in electronic applications. The aluminosilicate films exhibited apparent closed porosity and a dielectric constant as low as ≍5 with processing temperatures from 373 K to 873 K. The porosity was inaccessible to nitrogen at 77 K, helium at 293 K, and water vapor at 293 K. Both bulk and thin-film samples were analyzed for hydroxyl and carbon contents to elucidate the relative dependence of the measured electrical properties on processing conditions. Experiments indicate it is possible to vary the porosity in bulk material in ways that should improve electrical properties.

Type
Articles
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Hietala, S. L.Golden, J. L.Smith, D. M. and Brinker, C. J.J. Am. Ceram. Soc. 72, C2354 (1989).CrossRefGoogle Scholar
2Hietala, S. L. and Smith, D. M. “Low Density/Low Surface Area Silica-Alumina Composition,” patent SN 5028352, July 2, 1991.Google Scholar
3Hietala, S.L.Smith, D.M.Brinker, C.J.Hurd, A.J.Dando, N. and Carim, A.H.J. Am. Ceram. Soc. 73, 2815 (1990).CrossRefGoogle Scholar
4Hietala, S.L.Smith, D.M.Hietala, V.M.Frye, G.C.Hurd, A.J. and Brinker, C.J. in Better Ceramics Through Chemistry TV, edited by Zelinski, B.J.J.Brinker, C.J.Clark, D.E. and Ulrich, D.R. (Mater. Res. Soc. Symp. Proc. 180, Pittsburgh, PA, 1990), pp. 433437.Google Scholar
5Glaves, C.L.Frye, G.C.Smith, D.M.Brinker, C.J.Datye, A.Ricco, A. J. and Martin, S. J.Langmuir 5, 459 (1989).CrossRefGoogle Scholar
6Yarbrough, W.A.Gururaja, T. R. and Cross, L. E.Am. Ceram. Soc. Bull. 66 (4), 692 (1987).Google Scholar
7CRC Handbook of Chemistry and Physics, 70th ed., edited by Weast, R.C. (CRC Press Inc., Boca Raton, FL, 1989-1990).Google Scholar
8Kingery, W. D.Bowman, H. K. and Uhlmann, D. R.Introduction to Ceramics, 2nd ed. (John Wiley & Sons, New York, 1976), Chap. 18.Google Scholar
9Buchanan, R. C.Ceramic Materials for Electronics: Processing, Properties and Applications (Marcel Dekker, Inc., New York, 1986).Google Scholar
10Brinker, C. J. and Scherer, G. W.Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Academic Press, Inc., San Diego, CA, 1990), pp. 453617.Google Scholar
11Dielectric Materials and Applications: Papers by 22 Contributors, edited by Hippel, A. R. von (John Wiley & Sons, New York, 1954).Google Scholar
12Hayt, W. H. Jr. , Engineering Electromagnetics, 4th ed. (McGraw-Hill, Inc., New York, 1981).Google Scholar
13Hench, L. L. and West, J. K.Principles of Electronic Ceramics (John Wiley & Sons, Inc., New York, 1990).Google Scholar
14Chandreshkhar, G.V. and Shafer, M.W. in Better Ceramics Through Chemistry II, edited by Brinker, C. J.Clark, D. E. and Ulrich, D.R. (Mater. Res. Soc. Symp. Proc. 73, Pittsburgh, PA, 1986), pp. 705710.Google Scholar
15Nakamoto, K.Infrared and Raman Spectra of Inorganic and Coordination Compounds, 3rd ed. (John Wiley & Sons, New York, 1978).Google Scholar
16Kittel, C.Introduction to Solid State Physics, 5th ed. (John Wiley & Sons, New York, 1976).Google Scholar
17Davis, P.J.Brinker, C.J. and Smith, D.M.J. Non-Cryst. Solids 142, 189 (1992).Google Scholar
18Ceramic Source 6, 329 (1990).Google Scholar