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Characterization of composite carbon coatings deposited by dc cathodic arc technique

Published online by Cambridge University Press:  31 January 2011

B. Rother ,
J. Siegel ,
K. Breuer ,
I. Mühling ,
S. Deutschmann ,
J. Vetter ,
G. Trommer ,
B. Rau  and
C. Heiser
B. Rother
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
J. Siegel
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
K. Breuer
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
I. Mühling
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
S. Deutschmann
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
J. Vetter
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
G. Trommer
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
B. Rau
Affiliation:
Technische Universität Chemnitz, Sektion Physik-Elektronische Bauelemente, PF 964, Chemnitz (Karl-Marx-Stadt), 9010, Germany
C. Heiser
Affiliation:
Zentralinstitut für Kernforschung, Akademie der Wissenschaften der DDR, Rossendorf, PF 19, Dresden, 8051, Germany
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Abstract

Carbon films deposited by a modified dc cathodic arc technique were characterized by several analytical methods. The coatings consist of two constituents originating from process characteristics of the technique applied. Small fragments of graphite are embedded in a matrix material of an amorphous structure with diamond-like short-range order. The coatings exhibit friction and wear reducing properties.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 1 , January 1991 , pp. 101 - 111
Copyright
Copyright © Materials Research Society 1991

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