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Analysis of depth profiles of sol-gel derived multilayer coatings by Rutherford backscattering spectrometry and by cross-sectional transmission electron microscopy1

Published online by Cambridge University Press:  31 January 2011

Carol L. Schutte ,
Patrick M. Smith  and
George M. Whitesides
Carol L. Schutte
Affiliation:
Department of Chemistry, Harvard University, Cambridge, Massachusetts 02138 and Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
Patrick M. Smith
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, Massachusetts 02138
George M. Whitesides*
Affiliation:
Department of Chemistry, Harvard University, Cambridge, Massachusetts 02138
*
a)Address correspondence to this author.
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Abstract

This paper describes the preparation and compositional analysis of multilayer thin-film coatings prepared using sol-gel techniques. Alternate layers were labeled with an iron tag, derived from hydrolyzed 1,1'-bis(triethoxysilyl)ferrocene. Iron-free layers were composed of SiO2 derived from hydrolyzed tetraethylorthosilicate (TEOS). Analyses of these systems were based on Rutherford Backscattering Spectrometry (RBS) and Cross-Sectional Transmission Electron Microscopy (XTEM). The depth profile of iron, measured by RBS, yielded thicknesses (1000–1600 Å) for the individual layers that could be verified independently by XTEM.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 4 , April 1991 , pp. 835 - 839
Copyright
Copyright © Materials Research Society 1991

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References

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