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Synthesis of nanocrystalline diamond by the direct ion beam deposition method

Published online by Cambridge University Press:  31 January 2011

X. S. Sun ,
N. Wang ,
W. J. Zhang ,
H. K. Woo ,
X. D. Han ,
I. Bello ,
C. S. Lee  and
S. T. Lee
X. S. Sun
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
N. Wang
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
W. J. Zhang
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
H. K. Woo
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
X. D. Han
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
I. Bello
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
C. S. Lee
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
S. T. Lee*
Affiliation:
Center of Super-Diamond and Advanced Films, Department of Physics & Materials Science, City University of Hong Kong, Hong Kong
*
a) Address all correspondence to this author.[email protected]
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Abstract

Nanocrystalline diamond has been synthesized on a mirror-polished Si(001) substrate by means of direct ion beam deposition. Low-energy (80–200 eV) hydrocarbon and hydrogen ions, generated in a Kaufman ion source, were used to bombard the substrates. The bombarded samples were characterized by high-resolution transmission electron microscopy and Raman spectroscopy. Nanocrystalline diamond particles of random orientation were observed in a matrix of amorphous carbon film on the Si(001) substrate. The size of the nanocrystalline diamond particles varied in the range of 50–300 Å. The mechanism of ion-induced formation of nanocrystalline diamond is discussed.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 8 , August 1999 , pp. 3204 - 3207
Copyright
Copyright © Materials Research Society 1999

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