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Surface-interface micro-structures and mechanical properties of chemical vapor deposited diamond films

Published online by Cambridge University Press:  09 September 2016

Kong Dejun  and
Zhang Ling
Kong Dejun*
Affiliation:
School of Mechanical Engineering, Changzhou University, Changzhou 213164, China; and Jiangsu Key Laboratory of Materials Surface Science and Technology, Changzhou University, Changzhou 213164, China
Zhang Ling
Affiliation:
School of Mechanical Engineering, Changzhou University, Changzhou 213164, China
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

A diamond film was deposited on YT14 cemented carbide cutting tools with a chemical vapor deposition, the surface-interface morphologies, compositions of chemical elements, phases, atomic bonding energies, and structures of the films were analyzed with a scanning electron microscopy, energy dispersive spectrometer, x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, respectively, and the mechanical properties of the film were characterized with a nanoindentation and scratch test, respectively. The results show that the surface of diamond film is continuous and dense, the surface roughness of the film is 79.2 nm, and the average grain size is 478.2 nm. The atomic binding energies of C1s are composed of sp 2 at the Raman shift of 1363.01 cm−1 and sp 3 at the Raman shift of 1556.26 cm−1. The hardness and equivalent elastic modulus of the film is 16.27397 GPa and 166.1791 GPa, respectively, and the binding strength of the film-substrate is 26.2 N, showing a high anti-scratch ability.

Keywords

chemical vapor depositiondiamond filmsurface-interfacenanoindentationbonding strength
Type
Articles
Information
Journal of Materials Research , Volume 31 , Issue 18: Focus Section: Reinventing Boron Chemistry for the 21st Century , 28 September 2016 , pp. 2906 - 2915
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Copyright
Copyright © Materials Research Society 2016 

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References

REFERENCES

Liu, M.N., Bian, Y.B., Zheng, S.J., Zhu, T., Chen, Y.G., Chen, Y.L., and Wang, J.S.: Growth and mechanical properties of diamond films on cemented carbide with buffer layers. Thin Solid Films 584, 165 (2015).CrossRefGoogle Scholar
Xu, F., Xu, J.H., Yuen, M.F., Zheng, L., Lu, W.Z., and Zuo, D.W.: Adhesion improvement of diamond coatings on cemented carbide with high cobalt content using PVD interlayer. Diamond Relat. Mater. 34, 70 (2013).Google Scholar
Straffelini, G., Scardi, P., Molinari, A., and Polini, R.: Characterization and sliding behavior of HFCVD diamond coatings on WC–Co. Wear 249, 461 (2001).CrossRefGoogle Scholar
Zhang, D.C., Shen, B., and Sun, F.H.: Study on tribological behavior and cutting performance of CVD diamond and DLC films on Co-cemented tungsten carbide substrates. Appl. Surf. Sci. 56, 2479 (2010).CrossRefGoogle Scholar
Nibennaoune, Z., Geprge, D., Ahzi, S., Ruch, D., Remond, Y., and Gracio, J.J.: Numerical simulation of residual stresses in diamond coating on Ti–6Al–4V substrate. Thin Solid Films 518, 3260 (2010).CrossRefGoogle Scholar
Pigeat, P., Miska, P., Bougdira, J., and Easwarakhanthan, T.: Surface roughness of AlN films deposited on negatively biased silicon and diamond substrates. Diamond Relat. Mater. 18, 1393 (2009).Google Scholar
Zhu, R.H., Miao, J.Y., Liu, J.L., Chen, L.X., Guo, J.C., Hua, C.Y., Ding, T., Lian, H.K., and Li, C.M.: High temperature thermal conductivity of free-standing diamond films prepared by DC arc plasma jet CVD. Diamond Relat. Mater. 50, 55 (2014).CrossRefGoogle Scholar
Younes, B., Jacky, L., Didier, C., and Miche, L.M.: Structure and hardness of diamond films deposited on WC–Co by CVD technique. Surf. Coat. Technol. 227, 70–74 (2014).Google Scholar
Shen, B., Sun, F.H., Zhang, Z.M., Shen, H.S., and Guo, S.S.: Fabrication and application of CVD diamond coated cutting tools. Diamond Abrasives Eng. 30, 1 (2011).Google Scholar
Jansen, E., Dorsch, O., Obermeier, E., and Kulisch, W.: Thermal conductivity measurements on diamond films based on micromechanical devices. Diamond Relat. Mater. 5, 644 (1996).CrossRefGoogle Scholar
Tang, C.J., Fernandes, A.J.S., Jiang, X.F., Pinto, J.L., and Ye, H.: Impact of high microwave power on hydrogen impurity trapping in nanocrystalline diamond films grown with simultaneous nitrogen and oxygen addition into methane/hydrogen plasma. J. Cryst. Growth 434, 36 (2016).Google Scholar
Wei, Q.P., Yu, Z.M., Michael, N.R., Ashfold, Y.J., and Ma, L.: Synthesis of micro- or nano-crystalline diamond films on WC-Co substrates with various pretreatments by hot filament chemical vapor deposition. Appl. Surf. Sci. 256, 4357 (2010).Google Scholar
Morales, J., Apátiga, L.M., and Castaño, V.M.: Synthesis of diamond films from organic compounds by pulsed liquid injection CVD. Surf. Coat. Technol. 203, 610 (2008).CrossRefGoogle Scholar
Alexander, K., Marina, D., Bohuslav, R., Milan, V., Martin, S., Petr, E., and Martin, K.: Gas sensing properties of nanocrystalline diamond films. Diamond Relat. Mater. 19, 196 (2010).Google Scholar
Anirudha, V.S., Gilbert, P.U.P.A., David, S.G., Andrew, R.K., Mike, A., James, E.B., Tatyana, F., Shlomo, S.R., and Robert, W.C.: Surface composition, bonding, and morphology in the nucleation and growth of ultra-thin, high quality nanocrystalline diamond films. Diamond Relat. Mater. 16, 718 (2007).Google Scholar
Chowdury, S., Laugier, M.T., and Henry, J.: XRD stress analysis of CVD diamond coatings on SiC substrates. Int. J. Refract. Met. Hard Mater. 25, 39 (2007).Google Scholar
Ran, J.G. and Zhen, C.Q.: The evaluation of diamond films in XPS. Micro Manuf. Technol. 2, 8 (1990).Google Scholar
Wang, W., Hu, C., Li, F.N., Li, S.Y., Liu, Z.C., Wang, F., Fu, J., and Wang, H.X.: Palladium ohmic contact on hydrogen-terminated single crystal diamond film. Diamond Relat. Mater. 59, 90 (2015).Google Scholar
Kong, D.J. and Fu, G.Z.: Nanoindentation analysis of TiN, TiAlN and TiAlSiN coatings prepared by cathode ion plating. Sci. China: Technol. Sci. 58(1), 1360 (2015).Google Scholar
Fan, X., Nose, K.J., Diao, D.F., and Yoshida, T.: Nanoindentation behaviors of amorphous carbon films containing nanocrystalline graphite and diamond clusters prepared by radio frequency sputtering. Appl. Surf. Sci. 273, 816 (2013).CrossRefGoogle Scholar
Jiang, C., Luo, F., long, H., Hu, S.L., Li, B., and Wang, Y.Q.: Pulsed laser deposition of metallic films on the surface of diamond particles for diamond saw blades. Appl. Surf. Sci. 246, 207 (2005).Google Scholar
Agarwal, S. and Rao, P.V.: Experimental investigation of surface/subsurface damage formation and material removal mechanisms in SiC grinding. Int. J. Mach. Tool. Manu. 48(6), 698 (2008).CrossRefGoogle Scholar
Buijnsters, J.G., Shankar, P., Enckevort, W.J.P.V., Schermer, J.J., and Meulen, J.J.T.: Adhesion analysis of polycrystalline diamond films on molybdenum by means of scratch, indentation and sand abrasion testing. Thin Solid Films 474(1–2), 186 (2005).Google Scholar
Toque, J.A., Herliansyah, M.K., Hamdi, M., Ide-Ektessabi, A., and Sopyan, I.: Adhesion failure behavior of sputtered calcium phosphate thin film coatings evaluated using microscratch testing. J. Mech. Behav. Biomed. Mater. 3(4), 324 (2010).Google Scholar
Gauthier, C., Durier, A-L., and Fond, C.: Scratching of a coated polymer and mechanical analysis of a scratch resistance solution. Tribol. Int. 39(2), 88 (2006).Google Scholar
Kerans, R.J., Jero, P.D., and Parthasarathy, T.A.: Issues in the control of fiber/matrix interfaces in ceramic composites. Compos. Sci. Technol. 51(2), 291 (1994).CrossRefGoogle Scholar