Hostname: page-component-78c5997874-g7gxr Total loading time: 0 Render date: 2024-11-09T05:47:56.318Z Has data issue: false hasContentIssue false

Structure of a-C:N:H prepared from ammonia

Published online by Cambridge University Press:  01 December 2005

J.K. Walters
Affiliation:
School of Physical Sciences, University of Kent, Canterbury CT2 7NR, United Kingdom
D.M. Pickup
Affiliation:
School of Physical Sciences, University of Kent, Canterbury CT2 7NR, United Kingdom
R.J. Newport*
Affiliation:
School of Physical Sciences, University of Kent, Canterbury CT2 7NR, United Kingdom
*
a)Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

A range of nitrogen-doped amorphous hydrogenated carbon samples (a-C:Nx:H, where x = 3 at.% and x = 7 at.%) have been studied using neutron diffraction, inelastic neutron scattering (INS) and Fourier transform infra-red (FTIR) spectroscopy to obtain detailed information about their atomic-scale structure, particularly the bonding environment of the hydrogen. The results show that the overall atomic scale network structure of the two samples is very similar; however, the hydrogen-bonding sites alter subtly as the nitrogen content of the samples is increased.

Type
Articles
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Angus, J.C., Koidl, P. and Domitz, S.: Carbon thin films, in Plasma Deposited Thin Films, edited by Mort, J. and Jansen, F. (Chemical Rubber Company Press, Boca Raton, FL, 1989), p. 89.Google Scholar
2.Robertson, J.: Amorphous carbon. Adv. Phys. 35, 317 (1986).CrossRefGoogle Scholar
3.Lettington, A.H.: Applications of diamond-like carbon thin films. Carbon 36, 555 (1998).CrossRefGoogle Scholar
4.Kimock, F.M. and Knapp, B.J.: Commercial applications of ion-beam deposited diamond-like carbon (DLC) coatings. Surf. Coat. Technol. 56, 273 (1993).CrossRefGoogle Scholar
5.Debajyoti, D., Chen, K.H., Chattopadhyay, S. and Chen, L.C.: Spectroscopic studies of nitrogenated amorphous carbon films prepared by ion beam sputtering. J. Appl. Phys. 91, 4944 (2002).Google Scholar
6.Rodil, S.E., Olivares, R. and Arzate, H.: In vitro cytotoxicity of amorphous carbon films. Biomed. Mater. Eng. 15, 101 (2005).Google ScholarPubMed
7.Jones, D.I. and Stewart, A.D.: Properties of hydrogentated amorphous carbon films and the effects of doping. Philos. Mag. B 46, 423 (1982).CrossRefGoogle Scholar
8.Davis, C.A., Yin, Y., McKenzie, D.R., Hall, L.E., Kravtchinskaia, E., Keast, V., Amaratunga, G.J. and Veerasamy, V.S.: The structure of boron-, phosphorus-, and nitrogen-doped tetrahedral amorphous carbon deposited by cathodic arc. J. Non-Cryst. Solids 170, 46 (1994).CrossRefGoogle Scholar
9.Amir, O. and Kalish, R.: Properties of nitrogen-doped amorphous hydrogentated carbon films. J. Appl. Phys. 70, 4958 (1991).CrossRefGoogle Scholar
10.Mansour, A. and Ugolini, D.: Photoelectron spectroscopy study of amorphous a-CNx:H. Phys. Rev. B 47, 10201 (1993).CrossRefGoogle ScholarPubMed
11.Mendoza, D., Anguilar-Hernandez, J. and Contreras-Puente, G.: Graphite-like bonding induced in hydrogenated amorphous carbon films with high nitrogen content. Solid State Commun. 84, 1025 (1992).CrossRefGoogle Scholar
12.Veerasamy, V.S., Amaratunga, G.A.J., Milne, W.I., Robertson, J. and Fallon, P.J.: Influence of carbon ion energy on properties of highly tetrahedral diamond-like carbon. J. Non-Cryst. Solids 164–166, 1111 (1993).CrossRefGoogle Scholar
13.Davis, C.A., McKenzie, D.R., Yin, Y., Kravtchinskaia, E., Amaratunga, G.A.J. and Veerasamy, V.S.: Substitutional nitrogen doping of tetrahedral amorphous carbon. Philos. Mag. B 69, 1133 (1994).CrossRefGoogle Scholar
14.Liu, A.Y. and Cohen, M.L.: Structural properties and electronic structure of low-compressibility materials: β–Si3N4 and hypothetical β–C3N4. Phys. Rev. B 41, 10727 (1990).CrossRefGoogle ScholarPubMed
15.Han, H. and Feldman, B.J.: Structural and optical properties of amorphous carbon nitride. Solid State Commun. 65, 921 (1988).CrossRefGoogle Scholar
16.Franceschini, D.F., Achete, C.A., Freire, F.L., Beyer, W. and Mariotto, G.: Structural modifications in a-C:H films doped and implanted with nitrogen. Diamond Relat. Mater. 3, 88 (1993).CrossRefGoogle Scholar
17.Kaufman, J.H., Metin, S. and Saperstein, D.D.: Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active G and D bands. Phys. Rev. B 39, 13053 (1989).CrossRefGoogle ScholarPubMed
18.Viehland, J., Lin, S., Feldman, B.J., Kilgore, K. and Jones, M.I.: Search for the nitrogen dangling bond in amorphous hydrogentated carbon nitride. Solid State Commun. 80, 597 (1991).CrossRefGoogle Scholar
19.Li, D., Lopez, S., Chung, Y.W., Wang, M.S. and Sproul, W.D.: Ionized magnetron sputter deposition of amorphous carbon nitride thin films. J. Vac. Sci. Technol. A 13, 1063 (1995).CrossRefGoogle Scholar
20.Barradas, N.P., Khan, R.U.A., Anguita, J.V., Silva, S.R.P., Kreissig, U., Grötzschel, R. and Möller, W.: Growth and characterisation of amorphous carbon films doped with nitrogen. Nucl. Instrum. Meth. B 161, 969 (2000).CrossRefGoogle Scholar
21.Rodil, S.E., Ferrari, A.C., Robertson, J. and Muhl, S.: Infrared spectra of carbon nitride films. Thin Solid Films 420, 122 (2002).CrossRefGoogle Scholar
22.Bouchet-Fabre, B., Godet, C., Lacerda, M., Charvet, S., Zellama, K. and Ballutaud, D.: Stoichiometry and infrared absorption of amorphous a-C1−xNx:H carbon nitride films. J. Appl. Phys. 95, 3427 (2004).CrossRefGoogle Scholar
23.Rodil, S.E. and Muhl, S.: Bonding in amorphous carbon nitride. Diamond Relat. Mater. 13, 1521 (2004).CrossRefGoogle Scholar
24.Bouchet-Fabre, B., Zellama, K., Godet, C., Ballutaud, D. and Minea, T.: Comparative study of the structure of a-CNx and a-CNx:H films using NEXAFS, XPS and FT-IR analysis. Thin Solid Films 482, 156 (2005).CrossRefGoogle Scholar
25.Lazar, G., Zellama, K., Vascan, I., Stamate, M., Lazar, I. and Rusu, I.: Infrared absorption properties of amorphous carbon films. J Optoelectron. Adv. Mater. 7, 647 (2005).Google Scholar
26.Fanchini, G., Mandracci, P., Tagliaferro, A., Rodil, S.E., Vomiero, A. and Mea, G.D.: Growth and characterisation of polymeric amorphous carbon and carbon nitride films from propane. Diamond Relat. Mater. 14, 928 (2005).CrossRefGoogle Scholar
27.Rodil, S.E.: Infrared spectra of amorphous carbon-based materials. Diamond Relat. Mater. 14, 1262 (2005).CrossRefGoogle Scholar
28.Ripalda, J.M., Roman, E., Diaz, N., Galan, L., Montero, I., Comelli, G., Baraldi, A., Lizzit, S., Goldoni, A. and Paolucci, G.: Correlation of x-ray absorption and x-ray photoemission spectroscopies in amorphous carbon nitride. Phys. Rev. B 60, R3705 (1999).CrossRefGoogle Scholar
29.Ferlauto, A.S., Champi, A., Figueroa, C.A., Ribeiro, C.T.M., Marques, F.C. and Alvares, F.: Structural properties of amorphous carbon nitride films prepared by ion-beam-assisted deposition. J. Non-Cryst. Solids 338, 486 (2004).CrossRefGoogle Scholar
30.Marino, E., Bouchet-Fabre, B., Porterat, D. and Reynaud, C.: Spectroscopic study of carbon nitride nanoparticles synthesised by laser pyrolysis. Diamond Relat. Mater. 14, 1120 (2005).CrossRefGoogle Scholar
31.Walters, J.K., Honeybone, P.J.R., Huxley, D.W., Newport, R.J. and Howells, W.S.: The structural properties of amorphous hydrogenated carbon: I. A high resolution neutron diffraction study. Phys. Rev. B 50, 831 (1994).CrossRefGoogle Scholar
32.Walters, J.K., Newport, R.J., Howells, W.S. and Parker, S.F.: A spectroscopic study of the structure of amorphous hydrogenated carbon. J. Phys.: Condens. Matter 7, 10059 (1995).Google Scholar
33.Walters, J.K., Newport, R.J., Howells, W.S. and Bushnell-Wye, G.: Neutron and x-ray diffraction studies of a-C:N:H. J. Phys.: Condens. Matter 8, 4739 (1996).Google Scholar
34.Walters, J.K., Kühn, M., Spaeth, C., Dooryhee, E. and Newport, R.J.: X-ray diffraction studies of the effects of N incorporation in amorphous CNx materials. J. Appl. Phys. 83, 3529 (1998).CrossRefGoogle Scholar
35.Lazar, G. and Lazar, I.: IR characterisation of a-C:N:H films sputtered in Ar/CH4/N2 plasma. J. Non-Cryst. Solids 331, 70 (2003).CrossRefGoogle Scholar
36.Qui, Y. and Gao, L.: P-type carbon nitride synthesized by a gas-solid reaction. J Am. Ceram. Soc. 87, 1598 (2004).Google Scholar
37.Johnson, P.A.V., Wright, A.C. and Sinclair, R.N.: Neutron-scattering from vitreous silica. II. Twin-axis diffraction experiments. J. Non-Cryst. Solids 58, 109 (1983).CrossRefGoogle Scholar
38.Gaskell, P.H., Saeed, A., Chieux, P. and McKenzie, D.R.: The structure of highly tetrahedral amorphous diamond-like carbon I. Neutron-scattering studies. Philos. Mag. B 66, 155 (1992).CrossRefGoogle Scholar
39.Dischler, B., Bubenzer, A. and Koidl, P.: Bonding in hydrogenated hard carbon studied by optical spectroscopy. Solid State Comm. 48, 105 (1983).CrossRefGoogle Scholar
40.Angus, J.C., Stultz, J.E., Shiller, P.J., MacDonald, J.R., Mirtich, M.J. and Domitz, S.: Composition and properties of the so-called diamond-like amorphous-carbon films. Thin Solid Films 118, 311 (1984).CrossRefGoogle Scholar
41.Vandentrop, G.J., Kawasaki, M., Kobayashi, K. and Somorjai, G.A.: The effect of ion-energy flux on the properties of hydrogenated amorphous-carbon films. J. Vac. Sci. Technol. A 9, 1157 (1991).CrossRefGoogle Scholar
42.Walters, J.K., Fox, D.M., Burke, T.M., Weedon, O.D., Newport, R.J. and Howells, W.S.: The effect of temperature on the structure of amorphous hydrogenated carbon. J. Chem. Phys. 101, 4288 (1994).CrossRefGoogle Scholar
43.Ferrari, A.C., Rodil, S.E. and Robertson, J.: Interpretation of infrared and Raman spectra of amorphous carbon nitrides. Phys. Rev. B 67, 155306 (2003).CrossRefGoogle Scholar
44.Mauri, F. and Corso, A.D.: Vibrational properties of tetrahedral amorphous carbon from first principles. Appl. Phys. Lett. 75, 644 (1999).CrossRefGoogle Scholar
45.Franks, J.: Atom beam source. Vacuum 34, 259 (1984).CrossRefGoogle Scholar
46.Franks, J.: Preparation and properties of diamondlike-carbon films. J. Vac. Sci. Technol. A 7, 2307 (1989).CrossRefGoogle Scholar
47. User Guide to Experimental Facilities at ISIS, at www.isis.rl.ac.uk (Rutherford Appleton Laboratory, Didcot, U.K., 1992).Google Scholar
48.Newport, R.J.: The structure of liquids and amorphous solids, in Neutron Scattering at a Pulsed Source edited by Newport, R.J., Rainford, B.D. and Cywinski, R. (Hilger, Bristol, U.K., 1988), p. 233.Google Scholar
49.Squires, G.L.: Introduction to the theory of thermal neutron scattering (Cambridge University Press, Cambridge, 1978).Google Scholar
50.Gunn, J.M.F.: Theory of neutron scattering, in Neutron Scattering at a Pulsed Source, edited by Newport, R.J., Rainford, B.D., and Cywinski, R. (Hilger, Bristol, U.K., 1988), p. 24.Google Scholar
51.Howells, W.S., Soper, A.K. and Hannon, A.C. ATLAS—analysis of time-of-flight diffraction data from liquid and amorphous samples, Rutherford Appleton Laboratory Report RAL-89-046 (Rutherford Appleton Laboratory, Didcot, U.K., 1989).Google Scholar
52.Powles, J.G.: Slow neutron scattering by molecules. Mol. Phys. 36, 1181 (1978).CrossRefGoogle Scholar
53.Soper, A.K. and Bowron, D.T.: SANDALS—Small angle neutron diffractometer for amorphous and liquid samples, at www.isis.rl.ac.uk/Disordered/SANDALS.htm, and references therein (2000).Google Scholar
54.Parker, S.F., Carlile, C.J., Pike, T., Tomkinson, J., Newport, R.J., Andreani, C., Ricci, F.P., Sacchetti, F. and Zoppi, F.: TOSCA: A world class inelastic neutron spectrometer. Physica B 241–243, 154 (1998).Google Scholar
55.Lovesey, S.W.: Theory of Neutron Scattering from Condensed Matter, Vol. 1 (Clarendon Press, Oxford, U.K., 1984), pp. 257264.Google Scholar
56.Tomkinson, J.: Inelastic incoherent neutron scattering spectroscopy of hydrogen vibrations in metals and molecules, in Neutron Scattering at a Pulsed Source edited by Newport, R.J., Rainford, B.D. and Cywinski, R. (Hilger, Bristol, U.K., 1988), p. 324.Google Scholar
57.Lukins, P.B., McKenzie, D.R., Vassallo, A.M. and Hanna, J.V.: C-13 NMR and FTIR study of thermal annealing of amorphous hydrogenated carbon. Carbon 31, 569 (1993).CrossRefGoogle Scholar
58.Dischler, B., Bubenzer, A. and Koidl, P.: Bonding in hydrogenated hard carbon studies by optical spectroscopy. Solid State Commun. 48, 105 (1983).CrossRefGoogle Scholar
59.Gonzalez-Hernandez, J., Chao, B.S. and Pawlik, D.A.: Characterization of as-prepared and annealed hydrogenated carbon-films. J. Vac. Sci. Technol. 7, 2332 (1989).CrossRefGoogle Scholar
60.Novikov, N.V., Voronkin, M.A., Smekhnov, A.A., Zaika, N.I. and Zakharchuk, A.P.: Deposition by reactive ion-plasma sputtering and characterisation of C–N thin films. Diamond Relat. Mater. 4, 390 (1995).CrossRefGoogle Scholar