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Structure and optical properties of diamondlike carbon synthesized by plasma immersion ion processing

Published online by Cambridge University Press:  31 January 2011

Xiao-Ming He ,
D. H. Lee ,
K. C. Walter ,
D. Q. Li  and
M. Nastasi
Xiao-Ming He
Affiliation:
Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, New Mexico 87545
D. H. Lee
Affiliation:
Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, New Mexico 87545
K. C. Walter
Affiliation:
Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, New Mexico 87545
D. Q. Li
Affiliation:
Los Alamos National Laboratory, Chemical Science and Technology Division, Los Alamos, New Mexico 87545
M. Nastasi
Affiliation:
Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, New Mexico 87545
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Abstract

Hard and transparent diamondlike carbon (DLC) films have been prepared on room-temperature substrates by using a C2H2–Ar plasma immersion ion processing (PIIP) method. The optical properties of the DLC films with different thicknesses deposited on PMMA (polymethyl methacrylate), silicon wafers, and glass plates were systematically examined. It was found that careful control of substrate bias voltage was needed for favorable growth of DLC films with low atomic hydrogen content, high hardness and wear resistance, and excellent optical properties. The resultant DLC films exhibited a low friction coefficient, high optical gap energy, and very high optical transmittance both in infrared and visible light ranges. The study confirmed that C2H2–Ar PIIP with low negative bias voltages and suitable C2H2/Ar gas ratios can produce optically transparent and hard DLC films on optical materials.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 5 , May 1999 , pp. 2080 - 2087
Copyright
Copyright © Materials Research Society 1999

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