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Reactive coevaporation of YBaCuO superconducting films

Published online by Cambridge University Press:  31 January 2011

V. Matijasevic ,
P. Rosenthal ,
K. Shinohara ,
A.F. Marshall ,
R.H. Hammond  and
M.R. Beasley
V. Matijasevic
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
P. Rosenthal
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
K. Shinohara
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
A.F. Marshall
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
R.H. Hammond
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
M.R. Beasley
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
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Abstract

Growth conditions for YBaCuO thin films are investigated. Films have been made by reactive e-beam coevaporation using three metal sources. In the best cases, as-made films are superconducting with Tc's (R = 0) up to 90 K and Jc's (at 4.2 K) above 107 A/cm2. Oxygen pressure, deposition temperature, as well as compositional dependencies of the films are presented. It is found that in conditions of lower oxygen, pressure films with average composition off the 1–2–3 stoichiometry have higher Tc's. For pressure <10 mTorr, the highest Tc obtained is for Ba/Y deposition ratio ⋚1.4. The morphology and impurity phases of these films are examined. The Ba-deficient films have oriented CuYO2 and CuO as the dominant impurity phases. C-axis lattice parameters (c0) are also examined. It is found that for a given Tc, films made at lower pressure have c0's which are expanded compared to the films made at higher pressures (>100 mTorr). The expanded c0's for these films cannot be reduced by a low temperature oxygen anneal. We suggest that metal-atom point-like defects are quenched into these films and we discuss a particular Ba-for-Y substitution model.

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Journal of Materials Research , Volume 6 , Issue 4 , April 1991 , pp. 682 - 698
Copyright
Copyright © Materials Research Society 1991

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