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Quantitative phase transformation behavior in TiNi shape memory alloy thin films

Published online by Cambridge University Press:  01 October 2004

Bo-Kuai Lai ,
H. Kahn ,
S.M. Phillips ,
Z. Akase  and
A.H. Heuer
Bo-Kuai Lai
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio 44106
H. Kahn
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio 44106
S.M. Phillips
Affiliation:
Department of Electrical Engineering, Arizona State University, Tempe, Arizona 85287
Z. Akase
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio 44106
A.H. Heuer*
Affiliation:
Department of Materials Science and Engineering, Case Western Reserve University, Cleveland, Ohio 44106
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Phase transformations in near-equiatomic TiNi shape memory alloy thin films were studied, and the phase fraction evolutions were quantitatively correlated to the stress and resistivity of the films. TiNi thin films with compositions of 50.1, 51.1, and 51.7 at.% Ti all exhibited transformation temperatures between 65 and 100 °C, low residual stresses at room temperature (RT), and high recoverable stresses, thus making them suitable for microactuators in microelectromechanical systems. Low residual stresses at RT, less than 50 MPa, can be obtained even when only a small quantity of martensite, less than 30%, is present. Phase fraction evolution during complete thermal cycles (heating and cooling) was studied using elevated temperature x-ray diffraction, combined with quantitative Rietveld analysis. R-phase always appeared in these near-equiatomic TiNi thin films during cooling but did not have a noticeable effect on the stress–temperature hysteresis curves, which mainly depend on the phase fraction evolution of martensite. On the other hand, the occurrence of R-phase determined the variation of film resistivity. Martensite, austenite, and R-phase coexisting within a single grain were observed using transmission electron microscopy.

Keywords

Phase transformationThin filmX-ray photoelectron spectroscopy (XPS)
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 10 , October 2004 , pp. 2822 - 2833
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

1Wolf, R.H. and Heuer, A.H.: TiNi (shape memory) films on silicon for MEMS applications. J. Microelectromechanical Systems 4, 206 (1995).CrossRefGoogle Scholar
2Benard, W.L., Kahn, H., Heuer, A.H. and Huff, M.A. A titanium-nickel shape-memory alloy actuated micropump, in Transducers ’97, Proc. IEEE, 9th International conference on Solid state sensors and Actuators, Chicago, IL, 1997 , (IEEE, Piscataway, NJ).Google Scholar
3Lai, B-K.. Hahm, G., You, L., Shih, C-L., Kahn, H.Phillips, S.M. and Heuer, A.H.: The characterization of TiNi shape-memory actuated microvalves in Materials Science of Microelectromechanical Systems (MEMS) Devices III, edited by Kahn, H., deBoer, M., Judy, M., and Spearing, S.M.Mater. Res. Soc. Symp. Proc. 657, Warrendale, PA, 2001), EE8.3.1.Google Scholar
4Lee, A.P., Ciarlo, D.R., Krulevitch, P.A., Lehew, S., Trevino, J. and Northrup, M.A.: A practical microgripper by fine alignment, eutectic bonding and SMA actuation. Sens. Actuators A 54, 755 (1996).CrossRefGoogle Scholar
5Shih, C-L., Lai, B-K., Kahn, H., Phillips, S.M. and Heuer, A.H.: A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS. J. Microelectromechanical Systems 10, 69 (2001).CrossRefGoogle Scholar
6Sitepu, H., Schmahl, W.W., Allafi, J.K., Eggeler, G., Dlouhy, A., Toebbens, D.M. and Tovar, M.: Neutron diffraction phase analysis during thermal cycling of a Ni-rich NiTi shape memory alloy using the Rietveld method. Scripta Mater . 46, 543 (2002).CrossRefGoogle Scholar
7Ramanathan, G., Panoskaltsis, V.P., Mullen, R.L., and Welsch, G.: presented at the 15th ASCE Enginering Mechanics Conference, Columbia University, New York, NY (2002, unpublished).Google Scholar
8Boyd, J.G. and Lagoudas, D.C.: A thermodynamic constitutive model for the shape memory materials. Part I. The monolithic shape memory alloys. Int. J. Plast. 12, 805 (1996).CrossRefGoogle Scholar
9Gall, K. and Sehitoglu, H.: The role of texture in tension-compression asymmetry in polycrystalline NiTi. Int. J. Plast. 15, 69 (1999).CrossRefGoogle Scholar
10Bataillard, L., Bidaux, J-E. and Gotthardt, R.: Interaction between microstructure and multiple-step transformation in binary NiTi alloys using in-situ transmission electron microscopy observations. Philos. Mag. A 78, 327 (1998).CrossRefGoogle Scholar
11Frantz, M., Dufour-Gergam, E., Grandchamp, J.P., Bosseboeuf, A., Seiler, W., Nouet, G. and Catillon, G.: Shape memory thin films with transition above room temperature from Ni-rich NiTi films. Sens. Actuators A 99, 59 (2002).CrossRefGoogle Scholar
12Kulkov, S.N. and Mironov, Yu.P.: Martensitic transformation in NiTi investigated by synchrotron x-ray diffraction. Nucl. Instrum. Methods Phys. Res. Sect. A 359, 165 (1995).CrossRefGoogle Scholar
13Vaidyanathan, R., Bourke, M.A.M. and Dunand, D.C.: Phase fraction, texture and strain evolution in superelastic NiTi and NiTi-TiC composites investigated by neutron diffraction. Acta Mater. 47, 3353 (1999).CrossRefGoogle Scholar
14Lukáš, P., Šittner, P., Lugovoy, D., Neov, D. and Ceretti, M.: In situ neutron diffraction studies of the R-phase transformation in the NiTi shape memory alloy. Appl. Phys. A: Mater. Sci. Proc. 74 S1121 (2002).CrossRefGoogle Scholar
15Hill, R.J. and Howard, C.J.: Quantitative phase analysis from neutron powder diffraction data using the Rietveld method. J. Appl. Crystallogr. 20, 467 (1987).CrossRefGoogle Scholar
16Izumi, F. and Ikeda, T.: Rietan-2000. Mater. Sci. Forum 321–324, 189 (2000).Google Scholar
17Kudoh, K., Tokonami, M., Miyazaki, S. and Otsuka, K.: Crystal structure of the martensite in Ti-49.2 at.% Ni alloy analyzed by the single crystal x-ray diffraction method. Acta Metall. 33, 2049 (1985).CrossRefGoogle Scholar
18Hara, T., Ohba, T., Okunishi, E. and Otsuka, K.: Structural study of R-phase in Ti-50.23 at.% Ni-1.50 at.% Fe alloys.” Mater. Trans. JIM 38, 11 (1997).CrossRefGoogle Scholar
19Fukuda, T., Saburi, T., Doi, K. and Nenno, S.: Nucleation and self-accomodation of the R-phase in Ti-Ni alloys. Mater. Trans. JIM 33, 271 (1992).CrossRefGoogle Scholar
20Zu, X.T., Lin, L.B., Wang, Z.G., Zhu, S., You, L.P., Wang, L.M. and Huo, Y.: Influence of electron irradiation on the martensitic transformation of a binary TiNi shape memory alloy. J. Alloys Compd . 351, 87 (2003).CrossRefGoogle Scholar
21Otsuka, K. Introduction to the R-phase, in Engineering Aspects of Shape Memory Alloys, edited by Duerig, T.W., Melton, K.N., Stoeckel, D., and Wayman, C.M. (Butterworth-Heinemann, London, U.K., 1990), pp. 36–45.CrossRefGoogle Scholar
22Uchil, J., Mochandra, K.P., Mahesh, K.K. and Kumara, K.G.: Thermal and electrical characterization of R-phase dependence on heat-treat temperature in Nitinol. Physica B 253, 83 (1998).CrossRefGoogle Scholar
23Fu, Y. and Du, H.: Generation and relaxation of residual and recovery stress for sputtered TiNi films. Mater. Sci. Eng. A 342, 236 (2003).CrossRefGoogle Scholar
24Su, Q., Hua, S.Z. and Wuttig, M.: Martensitic transformation in Ni50Ti50 films. J. Alloys Compd. 211–212, 460 (1994).CrossRefGoogle Scholar
25Stemmer, S., Duscher, G., Scheu, C., Heuer, A.H. and Rühle, M.: The reaction between a TiNi shape memory thin film and silicon. J. Mater. Res. 12, 1734 (1997).CrossRefGoogle Scholar