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Properties of carbon films deposited by pulsed laser vaporization from pyrolytic graphite

Published online by Cambridge University Press:  31 January 2011

A. P. Malshe ,
S. M. Chaudhari ,
S. M. Kanetkar ,
S. B. Ogale ,
S. V. Rajarshi  and
S. T. Kshirsagar
A. P. Malshe
Affiliation:
Department of Physics, University of Poona, Pune-411007, India
S. M. Chaudhari
Affiliation:
Department of Physics, University of Poona, Pune-411007, India
S. M. Kanetkar
Affiliation:
Department of Physics, University of Poona, Pune-411007, India
S. B. Ogale
Affiliation:
Department of Physics, University of Poona, Pune-411007, India
S. V. Rajarshi
Affiliation:
School of Energy Studies, University of Poona, Pune-411007, India
S. T. Kshirsagar
Affiliation:
National Chemical Laboratory, Pune-411007, India
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Abstract

Amorphous carbon films have been deposited on silicon 〈111〉 and quartz substrates by pulsed ruby laser vaporization from pyrolytic graphite. Depositions have been carried out at different substrate temperatures, and the properties of the deposited carbon films have been studied using IR and UV–VIS transmission, ellipsometry, and laser-Raman spectroscopies. Chemical and electrical resistivity measurements have also been performed. It is shown that the film properties depend critically on the substrate temperature and that at the substrate temperature of 50 °C films with substantial proportion of sp3 hybridized orbitals are obtained.

Type
Articles
Information
Journal of Materials Research , Volume 4 , Issue 5 , October 1989 , pp. 1238 - 1242
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

1Clar, E., Polycrystalline Hydrocarbons (Academic Press, London, 1964).Google Scholar
2Kelly, B.T., Physics of Graphite (Applied Science, London, 1981).Google Scholar
3McLintock, I. S. and Orr, J. C., Physics and Chemistry of Carbon, edited by Walker, P.L. (Dekker, New York), Vol. 11.Google Scholar
4Noda, T., Inagaki, M., and Yamada, Y., J. Non-Cryst. Solids 1, 285 (1969).CrossRefGoogle Scholar
5Aisenberg, Sol and Chabot, Ronald, J. Appl. Phys. 42 (7), 2953 (1971).CrossRefGoogle Scholar
6Robertson, J., Advances In Physics 35 (4), 318 (1986).CrossRefGoogle Scholar
7Dijkkamp, D., Venkatesan, T., Wu, X.D., Saheen, S.A., Jisrawi, N., Min-Lee, Y. H., McLean, W. L., and Croft, M., Appl. Phys. Lett. 51, 619 (1987).CrossRefGoogle Scholar
8Joshi, Sushama, Nawathey, Rashmi, Koinkar, V. N., Godbole, V. P., Chaudhari, S. M., and Ogale, S. B., J. Appl. Phys. 64 (10), 5647 (1988).CrossRefGoogle Scholar
9Vispute, R. D., Godbole, V. P., Chaudhari, S.M., Kanetkar, S.M., and Ogale, S.B., J. Mater. Res. 3 (6), 1180 (1988).CrossRefGoogle Scholar
10Sato, Tetsuya, Furuno, Shigeo, Iguchi, Satoshi, and Hanabusa, Mitsugu, Jpn. J. Appl. Phys. 26 (9), L1487 (1987).Google Scholar
11Khirsagar, S.T., Khaladkar, N. R., Mamdapurkar, J. B., and Sinha, A. P. B., Jpn. J. Appl. Phys. 25, L1788 (1986).Google Scholar
12Venkatesan, T., Wu, X.D., Inam, A., and Wachtman, J.B., Appl. Phys. Lett. 52 (14), 1193 (1988).CrossRefGoogle Scholar
13Arakawa, E. T., Williams, M.W., and Inagaki, T. Jr., Appl. Phys. 48 (7), 3176 (1977).CrossRefGoogle Scholar
14Nemanich, R.J., Lucovsky, G., and Solin, S.A., Solid State Commun. 23, 117 (1977).CrossRefGoogle Scholar
15Wada, N., Solin, P.J., and Solin, S.A., J. Non-Cryst. Solids 35, 543 (1980).CrossRefGoogle Scholar
16Beeman, D., Silverman, J., Lynds, R., and Anderson, M. R., Phys. Rev. B 30, 870 (1984).CrossRefGoogle Scholar
17Nicklow, R., Wakabayashi, N., and Smith, H.G., Phys. Rev. B 5, 4951 (1972).CrossRefGoogle Scholar
18Alben, R., Weaire, D., Smith, J. E., and Brodsky, M. H., Phys. Rev. B 11, 2271 (1975).CrossRefGoogle Scholar
19Khan, A. Azim, Mathine, David, Woolam, John A., and Chung, Y., Phys. Rev. B 12, 7229 (1983).CrossRefGoogle Scholar
20Yoshikawa, M., Katagiri, G., Ishida, H., Ishitani, A., and Akamatsu, T., Solid State Commun. 66 (11), 1177 (1988).CrossRefGoogle Scholar