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Planar defects in ZnO thin films deposited on optical fibers and flat substrates

Published online by Cambridge University Press:  31 January 2011

Laurent Sagalowicz  and
Glen R. Fox
Laurent Sagalowicz
Affiliation:
Laboratoire de Céramique, D’epartement des Matériaux, EPFL, 1015 Lausanne, Switzerland
Glen R. Fox
Affiliation:
Laboratoire de Céramique, D’epartement des Matériaux, EPFL, 1015 Lausanne, Switzerland
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Abstract

The microstructure and the defects of ZnO coatings deposited at room temperature by sputtering onto fibers and flat substrates were characterized using transmission electron microscopy (TEM), scanning electron microscopy, and x-ray diffraction (XRD). XRD shows that the films have a [0001] preferred orientation and a large angular width of the 0002 reflection. According to TEM observations, the film microstructure consists of columnar grains which contain large concentrations of basal planar defects and dislocations. High-resolution transmission electron microscopy analysis and the associated image simulation are in full agreement with the presence of single (type I) and double (type II) stacking faults. The relation between the observed defects and the 0002 peak broadening is discussed.

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Articles
Information
Journal of Materials Research , Volume 14 , Issue 5 , May 1999 , pp. 1876 - 1885
Copyright
Copyright © Materials Research Society 1999

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