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Oxygen Gettering Effect During the Reactive Evaporation of Manganese Oxide Films

Published online by Cambridge University Press:  31 January 2011

Masaaki Isai ,
Katsuma Yamaguchi ,
Haruhiko Iyoda ,
Hiroshi Fujiyasu  and
Yasumitsu Ito
Masaaki Isai*
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Katsuma Yamaguchi
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Haruhiko Iyoda
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Hiroshi Fujiyasu
Affiliation:
Department of Electrical and Electronic Engineering, Shizuoka University, 3–5-1 Johoku, Hamamatsu 432–8561, Shizuoka, Japan
Yasumitsu Ito
Affiliation:
Miyakoda Electronics Technical Center, Suzuki Motor Corporation, Shinmiyakoda 1–1-2, Hamamatsu 431–2103, Shizuoka, Japan
*
a)e-mail: [email protected]
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Abstract

Manganese oxide films for lithium secondary batteries were prepared using a reactive evaporation method. Mn was evaporated from a molybdenum boat by resistive heating and deposited on a glass slide under oxygen atmosphere. These films were examined with x-ray photoelectron spectroscopy (XPS) and x-ray diffraction. The Mn oxide films with a wide valency of Mn were prepared in this study. A rapid change of the back pressure was found as the deposition of Mn was started. This implies that Mn atoms start to react with O2. This means that in situ detection of reactive evaporation process can be utilized.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 4 , April 1999 , pp. 1653 - 1657
Copyright
Copyright © Materials Research Society 1999

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