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Oxidation protection for a variety of transition metals and copper via surface silicides formed with silane containing atmospheres

Published online by Cambridge University Press:  31 January 2011

A.L. Cabrera ,
J.F. Kirner  and
J.N. Armor
A.L. Cabrera*
Affiliation:
Corporate Science and Technology Center, Air Products and Chemicals, Inc., Allentown, Pennsylvania 18195
J.F. Kirner
Affiliation:
Corporate Science and Technology Center, Air Products and Chemicals, Inc., Allentown, Pennsylvania 18195
J.N. Armor
Affiliation:
Corporate Science and Technology Center, Air Products and Chemicals, Inc., Allentown, Pennsylvania 18195
*
a)Current address: Pontificia Universidad Catolica de Chile, Facultad de Física, Casilla 6177, Santiago 22, Chile.
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Abstract

The reaction of SiH4/H2 mixtures with iron, cobalt, nickel, copper, chromium, molybdenum, and tungsten, at temperatures between 350 and 800 °C and 1 atm of total pressure, was studied. When the amount of water vapor in the gas mixture is carefully controlled, a metal silicide diffusion coating forms at the appropriate treatment temperature. Cu silicide coatings form at temperatures as low as 350 °C. Metal silicide coatings for Fe, Ni, Co, and Cr form at intermediate temperatures (500–700 °C), and higher temperatures (above 700 °C) are required for W and Mo. Composition and structure of the metal silicide coatings were determined by Auger depth profiling and x-ray diffraction. Kinetics of the surface reaction between SiH4 and the metal substrate as well as the behavior of these coatings in oxidizing environments at high temperatures were studied by a microgravimetric technique. The metal silicide coatings provide oxidation protection for Fe, Ni, and Cr in pure O2 up to 1000 °C, for W and Mo in air up to 900 °C, and for Cu exposed to air up to 700 °C.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 1 , January 1991 , pp. 71 - 79
Copyright
Copyright © Materials Research Society 1991

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References

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