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Oxidation of c-axis-oriented epitaxial YBa2Cu3O7–δ thin films in ozone-containing atmospheres

Published online by Cambridge University Press:  31 January 2011

B. J. Gibbons ,
C. B. Eom ,
R. A. Rao ,
S. Trolier-McKinstry  and
D. G. Schlom
B. J. Gibbons*
Affiliation:
Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
C. B. Eom
Affiliation:
University of Wisconsin—Madison, Madison, Wisconsin 53706
R. A. Rao
Affiliation:
University of Wisconsin—Madison, Madison, Wisconsin 53706
S. Trolier-McKinstry
Affiliation:
The Pennsylvania State University, University Park, Pennsylvania 16802
D. G. Schlom
Affiliation:
The Pennsylvania State University, University Park, Pennsylvania 16802
*
a)Address all correspondence to this author.[email protected]
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Abstract

Oxygen diffusion into c-axis-oriented YBa2Cu3O7-δ epitaxial thin films was observed using real-time spectroscopic ellipsometry. The experiments were conducted under controlled atmospheres of 10% O3/90% O2 and 80% O3/20% O2. At 2 × 10-5 torr, oxidation of the films began at temperatures as low as 100–125 °C for heating rates ≤3 °C/min. Full oxidation was seen by 190 °C at these rates. Based on these data, the activation energy of oxygen diffusion into YBa2Cu3O7-δ from an ozone/oxygen atmosphere was found to be between 0.43 and 0.52 eV. This was appreciably smaller than for in-diffusion in a molecular oxygen atmosphere. Higher ozone content atmospheres did not improve the oxidation kinetics. These atmospheres did, however, delay the onset of reduction in the films by 60–70 °C at higher temperatures.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 4 , April 2002 , pp. 884 - 889
Copyright
Copyright © Materials Research Society 2002

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