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Optical spectroscopic study of the radio-frequency oxygen thermal plasma evaporated YBa2Cu3O7−x

Published online by Cambridge University Press:  31 January 2011

Shigenori Yuhya ,
Jiro Tsujino ,
Noriyuki Tatsumi  and
Yuh Shiohara
Shigenori Yuhya
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13 Shinonome, 1-chome, Koto-ku, Tokyo 135, Japan
Jiro Tsujino
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13 Shinonome, 1-chome, Koto-ku, Tokyo 135, Japan
Noriyuki Tatsumi
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13 Shinonome, 1-chome, Koto-ku, Tokyo 135, Japan
Yuh Shiohara
Affiliation:
Superconductivity Research Laboratory, ISTEC, 10-13 Shinonome, 1-chome, Koto-ku, Tokyo 135, Japan
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Abstract

Optical emission spectroscopy of the rf thermal plasma evaporated YBa2Cu3O7−x has been investigated. The deposited films with the nearly stoichiometric composition could be obtained by using Y-rich powder. From the optical emission spectra, O, Y, Y+, Ba, Ba+, Cu, and YO as the emitting species were observed. The excitation temperature was lower for Y+ than for the other dissociated elements. The relative intensity for YO of a suboxide became larger with a lower plasma torch. It is thought that the deposited film that is poor in Y results from YO sticking to the substrate rather than Y or Y+.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 4 , April 1993 , pp. 709 - 712
Copyright
Copyright © Materials Research Society 1993

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References

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