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Optical properties of amorphous hydrogenated carbon films: A spectroscopic ellipsometry study

Published online by Cambridge University Press:  31 January 2011

Shuhan Lin  and
Shuguang Chen
Shuhan Lin
Affiliation:
Department of Physics, Zhongshan University, Guangzhou, People's Republic of China
Shuguang Chen
Affiliation:
Department of Physics, Zhongshan University, Guangzhou, People's Republic of China
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Abstract

Optical properties of plasma-deposited amorphous hydrogenated carbon films were studied by spectroscopic ellipsometry. From the ellipsometry data, the real and imaginary parts, n and k, of the complex index of refraction of the film have been deduced for photon energies between 2.0 and 4.0 eV for as-grown as well as for thermally annealed films. Here n and k showed considerable variation with subsequent annealing, even under 400°C. A tentative explanation of the results is proposed.

Type
Articles
Information
Journal of Materials Research , Volume 2 , Issue 5 , October 1987 , pp. 645 - 647
Copyright
Copyright © Materials Research Society 1987

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References

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