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OMCVD of thin films from metal diketonates and triphenylbismuth

Published online by Cambridge University Press:  31 January 2011

A. D. Berry ,
R. T. Holm ,
M. Fatemi  and
D. K. Gaskill
A. D. Berry
Affiliation:
Naval Research Laboratory, Washington, DC 20375–5000
R. T. Holm
Affiliation:
Naval Research Laboratory, Washington, DC 20375–5000
M. Fatemi
Affiliation:
Naval Research Laboratory, Washington, DC 20375–5000
D. K. Gaskill
Affiliation:
Naval Research Laboratory, Washington, DC 20375–5000
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Abstract

Films containing the metals copper, yttrium, calcium, strontium, barium, and bismuth were grown by organometallic chemical vapor deposition (OMCVD). Depositions were carried out at atmospheric pressure in an oxygen-rich environment using metal beta-diketonates and triphenylbismuth. The films were characterized by Auger electron spectroscopy, Nomarski and scanning electron microscopy, and x-ray diffraction. The results show that films containing yttrium consisted of Y2O3 with a small amount of carbidic carbon, those with copper and bismuth were mixtures of oxides with no detectable carbon, and those with calcium, strontium, and barium contained carbonates. Use of a partially fluorinated barium beta-diketonate gave films of BaF2 with small amounts of BaCO3.

Type
Articles
Information
Journal of Materials Research , Volume 5 , Issue 6 , June 1990 , pp. 1169 - 1175
Copyright
Copyright © Materials Research Society 1990

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