Article contents
A model for the effect of line width and mechanical strength on electromigration failure of interconnects with “near-bamboo” grain structures
Published online by Cambridge University Press: 31 January 2011
Abstract
A simple analytical model for the effect of mechanical strength and line width (for the case of narrow lines) on the electromigration failure of metallic interconnects is presented. Because the line width/grain size ratio and the diffusivity enter differently in the model, application of the resulting failure time equation to published data can provide insight into the mechanisms of enhancement of electromigration resistance by grain structure optimization and alloying.
- Type
- Articles
- Information
- Copyright
- Copyright © Materials Research Society 1991
References
2Ames, I., d'Heurle, F. M., and Horstman, R. E., IBM J. Res. Dev. 14, 461–463 (1970).CrossRefGoogle Scholar
3d'Heurle, F. M., Gangulee, A., Aliotta, C. F., and Ranieri, V. A., J. Electron. Mater. 4, 497–515 (1975).CrossRefGoogle Scholar
4d'Heurle, F. M., Gangulee, A., Aliotta, C. F., and Ranieri, V. A., J. Appl. Phys. 46, 4845–4846 (1975).CrossRefGoogle Scholar
9Vaidya, S., Sheng, T. T., and Sinha, A. K., Appl. Phys. Lett. 36:6, 464–466 (1980).CrossRefGoogle Scholar
11Arzt, E., in New Materials by Mechanical Alloying Techniques, edited by Arzt, E. and Schultz, L. (DGM, Oberursel, Germany, 1989), pp. 185–200.Google Scholar
13Kinsbron, E., Blech, I. A., and Komem, Y., Thin Solid Films 446, 139 (1977).CrossRefGoogle Scholar
16Sanchez, J., McKnelly, L. T., and Morris, J. W., Appl. Phys. Lett. (in press, 1990).Google Scholar
18Palmer, I. G., Thomas, M. P., and Marshall, G. J., in Dispersion Strengthened Aluminum Alloys, edited by Kim, Y-W. and Griffith, W. M. (TMS, 1988), pp. 217–241.Google Scholar
- 87
- Cited by