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Microwave sintering of high-density, high thermal conductivity AlN

Published online by Cambridge University Press:  31 January 2011

Geng-fu Xu ,
Tayo Olorunyolemi ,
Otto C. Wilson ,
Isabel K. Lloyd  and
Yuval Carmel
Geng-fu Xu
Affiliation:
Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland 20742
Tayo Olorunyolemi
Affiliation:
Institute of Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742
Otto C. Wilson
Affiliation:
Department of Materials and Nuclear Engineering, and Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742
Isabel K. Lloyd
Affiliation:
Department of Materials and Nuclear Engineering, and Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742
Yuval Carmel
Affiliation:
Institute of Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742
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Abstract

Microwave energy was used to sinter high thermal conductivity AlN ceramics (160–225 W/mK). The effects of sintering time, temperature, and amount of additive on phase composition, phase distribution, densification behavior, grain growth, and thermal conductivity were studied. The thermal conductivity of AlN was greatly improved by the addition of Y2O3, extended sintering time, and higher sintering temperatures. Thermal conductivity development in Y2O3-doped AlN showed two distinctive time regimes: (i) densification, where full densification, secondary phase formation, concentration and segregation, and rapid purification of AlN grains occur, accompanied by a large increase in thermal conductivity; (ii) postdensification, where grain growth and secondary phase sublimation/evaporation occur, yielding a further increase in thermal conductivity. Our results indicate that microwave sintering is a promising approach for synthesis of high thermal conductivity AlN ceramics.

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Articles
Information
Journal of Materials Research , Volume 17 , Issue 11 , November 2002 , pp. 2837 - 2845
Copyright
Copyright © Materials Research Society 2002

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