Hostname: page-component-cd9895bd7-8ctnn Total loading time: 0 Render date: 2024-12-23T11:47:07.006Z Has data issue: false hasContentIssue false
  • English
  • Français

Localized compression and shear tests on nanotargets with a Berkovich tip and a novel multifunctional tip

Published online by Cambridge University Press:  31 January 2011

A. Rinaldi ,
P. Peralta ,
C. Friesen ,
N. Chawla ,
E. Traversa  and
K. Sieradzki
A. Rinaldi*
Affiliation:
Fulton School of Engineering, Arizona State University, Tempe, Arizona 85287; and University of Rome “Tor Vergata”, NAST, Via della Ricerca Scientifica, Roma 00133, Italy
P. Peralta
Affiliation:
Fulton School of Engineering, Arizona State University, Tempe, Arizona 85287; and University of Rome “Tor Vergata”, NAST, Via della Ricerca Scientifica, Roma 00133, Italy
C. Friesen
Affiliation:
Fulton School of Engineering, Arizona State University, Tempe, Arizona 85287; and University of Rome “Tor Vergata”, NAST, Via della Ricerca Scientifica, Roma 00133, Italy
N. Chawla
Affiliation:
Fulton School of Engineering, Arizona State University, Tempe, Arizona 85287
E. Traversa
Affiliation:
University of Rome “Tor Vergata”, NAST, Via della Ricerca Scientifica, Roma 00133, Italy
K. Sieradzki
Affiliation:
Fulton School of Engineering, Arizona State University, Tempe, Arizona 85287
*
a) Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

This article presents an experimental procedure to perform highly localized compression tests on nanoscale structures/features, such as nanospheres and nanopillars, via standard nanoindentation equipment. Current manufacturing capabilities, such as focused ion beam (FIB), lend themselves well to the creation of micron-spaced nanostructures, but it is fundamental to target an individual instance with little or no damage to the surrounding ones. The procedure successfully addresses the problem of locating and testing purposely designed nanostructures of order of 50 nm or less. The technique is illustrated for the case of closely spaced arrays of nanopillars, which were successfully manufactured, characterized, and tested through several pieces of equipment. For the purposes of compression, along with a traditional Berkovich tip, a new multifunctional (MF) tip was devised. This last tip is endowed with a complex contact geometry enabling both atomic force microscope (AFM) scanning and flat punch compression of the nanostructure. The levels of accuracy in tip positioning as well as robustness to alignment errors are unprecedented in comparison with previous in situ compression tests. As a consequence, the MF tip becomes a versatile tool that can be used beyond uniform compression. As an example, ancillary shear tests in controlled conditions are reported. Such results may lay the bases for metal-forming processes at the nanoscale, such as nanoforging or cutting operations, which are relevant to MEMS design and manufacturing.

Keywords

NanoindentationScanning-probe microscopy (SPM)Structural
Type
Articles
Information
Journal of Materials Research , Volume 24 , Issue 3 , March 2009 , pp. 768 - 775
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Fleck, N.A. and Hutchinson, J.W.: A phenomenological theory for strain gradient effects in plasticity. J. Mech. Phys. Solids 41, 1825 (1993).CrossRefGoogle Scholar
2.Nix, W.D. and Gao, H.: Indentation size effects in crystalline materials: A law for strain gradient plasticity. J. Mech. Phys. Solids 46, 411 (1998).CrossRefGoogle Scholar
3.Gerberich, W.W., Tymiak, N.I., Grunian, J.C., Horstmeyer, M.F., and Baskes, M.I.: Interpretations of indentation size effects. J. Appl. Mech. 69, 433 (2002).CrossRefGoogle Scholar
4.Gerberich, W.W., Mook, W.M., Perrey, C.R., Carter, C.B., Baskes, M.I., Mukherjee, R., Gidwani, A., Heberlein, J., McMurry, P.H., and Girshick, S.L.: Superhard silicon nanospheres. J. Mech. Phys. Solids 51, 979 (2003).CrossRefGoogle Scholar
5.Gerberich, W.W., Mook, W.M., Cordill, M.J., Carter, C.B., Perrey, C.R., Heberlein, J.V., and Girshick, S.L.: Reverse plasticity in single crystal silicon nanospheres. Int. J. Plast. 21, 2391 (2005).CrossRefGoogle Scholar
6.Mook, W.M., Nowak, J.D., Perrey, C.R., Carter, C.B., Mukherjee, R., Girshick, S.L., McMurry, P.H., and Gerberich, W.W.: Compressive stress effects on nanoparticle modulus and fracture. Phys. Rev. B: Condens. Matter 75, 214112 (2007).CrossRefGoogle Scholar
7.Zou, M. and Yang, D.: Nanoindentation of silica nanoparticles attached to a silicon substrate. Tribol. Lett. 22, 189 (2006).CrossRefGoogle Scholar
8.Wong, E.W., Sheehan, P.E., and Lieber, C.M.: Nanobeam mechanics: Elasticity, strength, and toughness of nanorods and nano-tubes. Science 211, 1971 (1997).CrossRefGoogle Scholar
9.Sundararajan, S., Bhushan, B., Namazu, T., and Isono, Y.: Mechanical property measurements of nanoscale structures using an atomic force microscope. Ultramicrosconv 91, 111 (2002).CrossRefGoogle ScholarPubMed
10.Bin, W., Heidelberg, A., and Boland, J.J.: Mechanical properties of ultrahigh-strength gold nanowires. Nat. Mater. 4, 526 (2005).Google Scholar
11.Uchic, M.D., Dennis, M.D., Florando, J.N., and Nix, W.D.: Sample dimensions influence strength and crystal plasticity. Science 305, 986 (2004).CrossRefGoogle ScholarPubMed
12.Greer, J.R., Oliver, W.C., and Nix, W.D.: Size dependence of mechanical properties of gold at the micron length scale in the absence of strain gradients. Acta Mater. 53, 1821 (2005).CrossRefGoogle Scholar
13.Greer, J.R., Oliver, W.C., and Nix, W.D.: Corrigendum to “Size dependence in mechanical properties of gold at the micron scale in the absence of strain gradients [Acta Mater. 53, 1821 (2005)]”. Acta Mater. 54, 1705 (2006).CrossRefGoogle Scholar
14.Greer, J.R. and Nix, W.D.: Size dependence of mechanical properties of gold at the sub-micron length scale. Appl. Phys. A 80, 1625 (2005).CrossRefGoogle Scholar
15.Greer, J.R. and Nix, W.D.: Nanoscale gold pillars strengthened through dislocation starvation. Phys. Rev. B: Condens. Matter 73, 245410 (2006).CrossRefGoogle Scholar
16.Budiman, A.S., Han, S.M., Greer, J.R., Tamura, N., Patel, J.R., and Nix, W.D.: A search for evidence of strain gradient hardening in Au submicron pillars under uniaxial compression using synchrotron x-ray microdiffraction. Acta Mater. 56, 602 (2008).CrossRefGoogle Scholar
17.Brinckmann, S., Kim, J., and Greer, J.R.: Fundamental differences in mechanical behavior between two types of crystals at the nanoscale. Phys. Rev. Lett. 100, 155502 (2008).CrossRefGoogle ScholarPubMed
18.Volkert, C.A. and Lilleodden, E.T.: Size effects in the deformation of sub-micron Au columns. Philos. Mag. 86, 5567 (2006).CrossRefGoogle Scholar
19.Volkert, C.A., Lilleodden, E.T., Kramer, D., and Weissmuller, J.: High strength nanoporous Au. Appl. Phys. Lett. 89, 061920 (2006).CrossRefGoogle Scholar
20.Lee, C.J., Huang, J.C., and Nieh, T.G.: Sample size effect and microcompression of Mg65Cu25Gd10 metallic glass. Appl. Phys. Lett. 91, 161913 (2007).CrossRefGoogle Scholar
21.Michler, J., Wasmer, K., Meier, S., and Ostlunda, F.: Plastic deformation of gallium arsenide micropillars under uniaxial compression at room temperature. Appl. Phys. Lett. 90, 043123 (2007).CrossRefGoogle Scholar
22.Beia, H., Shim, S., Miller, M.K., Pharr, G.M., and George, E.P.: Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal. Appl. Phys. Lett. 91, 111915 (2007).CrossRefGoogle Scholar
23.Greer, J.R., Espinosa, H., Ramesh, K.T., and Nadgorny, E.: Comment on “Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal” [Appl. Phys. Lett. 91, 111915 (2007)]. Appl. Phys. Lett. 92, 096101 (2008).CrossRefGoogle Scholar
24.Bei, H., Shim, S., George, E.P., Miller, M.K., Herbert, E.G., and Pharr, G.M.: Compressive strengths of molybdenum alloy micro-pillars prepared using a new technique. Scr. Mater. 57, 397 (2007).CrossRefGoogle Scholar
25.Bei, H., Shim, S., Pharr, G.M., and Gorge, E.P.: Effects of pre-strain on the compressive stress-strain response of Mo-alloy single-crystal micropillars. Acta Mater. 56, 4762 (2008).CrossRefGoogle Scholar
26.Zepeda-Ruiz, L.A., Sadigh, B., Biener, J., Hodge, A.M., and Hamza, A.V.: Mechanical response of freestanding Au nanopillars under compression. Appl. Phys. Lett. 91, 101907 (2007).CrossRefGoogle Scholar
27.Tang, H., Schwarz, K.W., and Espinosa, H.D.: Dislocation escape-related size effects in single-crystal micropillars under uniaxial compression. Acta Mater. 55, 1607 (2007).CrossRefGoogle Scholar
28.Zhang, H., Schuster, B.E., Wei, Q., and Ramesh, K.T.: The design of accurate micro-compression experiments. Scr. Mater. 54, 181 (2006).CrossRefGoogle Scholar
29.Carlton, C.E., Lourie, O., and Ferreira, P.J.: In-situ TEM nanoindentation of individual single-crystal nanoparticles. Microsc. Microanal. 13(Suppl 2), 576 CD (2007).CrossRefGoogle Scholar
30.Shan, W., Mishra, R.K., Asif, S.A.S., Warren, O., and Minor, A.M.: Mechanical annealing and source-limited deformation in submicrometre-diameter Ni crystals. Nat. Mater. 7, 115 (2008).CrossRefGoogle ScholarPubMed
31.Rinaldi, A., Peralta, P., Friesen, C., and Sieradzki, K.: Sample-size effects in the yield behavior of nanocrystalline nickel. Acta Mater. 56, 511 (2008).CrossRefGoogle Scholar