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Layered in situ copper/polyimide composite films
Published online by Cambridge University Press: 31 January 2011
Abstract
Incorporation of bis (trifluoroacetylacetonato) copper (II), Cu (TFA)2 into poly (amide acid) prior to imidization produces bi-and trilayered composite films upon curing. Choice of curing atmosphere and concentration of dopant control the formation of a particular layered structure. Dry air and 100% relative humidity are the curing atmospheres used. The trilayered films are typified by a zero-valent copper layer sandwiched between a thin polyimide overlayer and the bulk polyimide. Curing in 100% relative humidity produces the thinnest overlayer. By doubling the dopant concentration used to prepare the trilayered films, bilayered films will result upon curing. In this instance the lack of a polyimide overlayer affords the oxidation of copper at the surface to copper (II) oxide. In each case the formation of the copper layer results from the migration of all Cu (TFA)2 from a depth of approximately 2000 Å to the surface where subsequent reactions take place. Several [Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM)] analytical techniques are used to characterize the physical and chemical nature of the films.
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