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Laser micromachining of Al2O3−TiC ceramics

Published online by Cambridge University Press:  31 January 2011

V. Oliveira ,
R. Vilar ,
O. Conde  and
P. Freitas
V. Oliveira
Affiliation:
Department of Materials, Instituto Superior Técnico, Av. Rovisco Pais, 1096 Lisbon, Portugal
R. Vilar
Affiliation:
Department of Materials, Instituto Superior Técnico, Av. Rovisco Pais, 1096 Lisbon, Portugal
O. Conde
Affiliation:
Department of Physics, University of Lisbon, Campo Grande Ed. C1, 1700 Lisbon, Portugal
P. Freitas
Affiliation:
Department of Physics, Instituto Superior Técnico, Av. Rovisco Pais, 1096 Lisbon, Portugal
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Abstract

Al2O3−34 wt.% TiC ceramics have been machined with a KrF (248 nm) excimer laser under normal atmosphere. In the initial steps of the irradiation process both the roughness and the removal rate present a strong variation with the number of pulses. After approximately 200 pulses the process reaches a stationary regime where the roughness and the removal rate become constant. Characterization of the machined areas by scanning electron microscopy showed that the variations in roughness and removal rate are related to the evolution of the surface topography of the samples. Also, as a consequence of laser irradiation, TiC and Al2O3 are partially transformed into TiO2, TiC0.7N0.3, and an Al–Ti solid solution.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 12 , December 1997 , pp. 3206 - 3209
Copyright
Copyright © Materials Research Society 1997

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References

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