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Investigation of silicon nanoclusters embedded in ZnO matrices deposited by cosputtering system

Published online by Cambridge University Press:  31 January 2011

Li-Wen Lai ,
Chih-Hong Liu ,
Ching-Ting Lee ,
Li-Ren Lou ,
Wen-Yung Yeh  and
Mu-Tao Chu
Li-Wen Lai
Affiliation:
Institute of Microelectronics, Department of Electrical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, 701 Tainan, Taiwan, Republic of China
Chih-Hong Liu
Affiliation:
Institute of Electro-Optical Science and Engineering, National Cheng Kung University, 701 Tainan, Taiwan, Republic of China
Ching-Ting Lee*
Affiliation:
Institute of Microelectronics, Department of Electrical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, 701 Tainan, Taiwan, Republic of China
Li-Ren Lou
Affiliation:
Institute of Microelectronics, Department of Electrical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, 701 Tainan, Taiwan, Republic of China
Wen-Yung Yeh
Affiliation:
Optoelectronics Semiconductor and System Application Div., Industrial Technology Research Institute, 310 Hsin Chu, Taiwan, Republic of China
Mu-Tao Chu
Affiliation:
Optoelectronics Semiconductor and System Application Div., Industrial Technology Research Institute, 310 Hsin Chu, Taiwan, Republic of China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

A co-sputtering system was used to deposit silicon nanoclusters embedded in zinc oxide matrix (Si:ZnO) at low temperature without post-annealing. By adjusting the radio frequency power of the Si target during co-sputtering, Si:ZnO films with various crystallographic structures can be obtained. Silicon nanoclusters embedded in the zinc oxide matrix were examined using a high-resolution transmission electron microscope, x-ray diffractometer, and Fourier transformation infrared spectrometry. By comparing with photoluminescence spectra, we can clearly identify quantum confinement effect of silicon nanoclusters embedded in the ZnO matrix.

Keywords

SputteringTransmission electron microscopy (TEM)X-ray diffraction (XRD)
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 9 , September 2008 , pp. 2506 - 2511
Copyright
Copyright © Materials Research Society 2008

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