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In situ Transmission Electron Microscopy Ion Irradiation Studies at Orsay

Published online by Cambridge University Press:  01 July 2005

M-O. Ruault ,
F. Fortuna ,
H. Bernas ,
J. Chaumont ,
O. Kaïtasov  and
V.A. Borodin
M-O. Ruault
Affiliation:
Centre de Spectrométrie Nucléaire et Spectrométrie de Masse, 91405 Orsay, Campus, France
F. Fortuna
Affiliation:
Centre de Spectrométrie Nucléaire et Spectrométrie de Masse, 91405 Orsay, Campus, France
H. Bernas
Affiliation:
Centre de Spectrométrie Nucléaire et Spectrométrie de Masse, 91405 Orsay, Campus, France
J. Chaumont
Affiliation:
Centre de Spectrométrie Nucléaire et Spectrométrie de Masse, 91405 Orsay, Campus, France
O. Kaïtasov
Affiliation:
Centre de Spectrométrie Nucléaire et Spectrométrie de Masse, 91405 Orsay, Campus, France
V.A. Borodin
Affiliation:
Russian Research Center Kurchatov Institute, 123 182 Moscow, Russia
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Abstract

Crucial features of materials evolution due to ion beam irradiation are often revealed only through studies of process dynamics. We review some significant examples of such experiments performed over the last 25 years with the Orsay in situ facility: a transmission electron microscope setup (with temperature stages operating between 4 and 1000 K) on a medium energy (3–570 keV) ion beam line. New results on nanocavity evolution and metal silicide nanoprecipitates in Si are presented briefly.We show that CoSi2 nanoprecipitate growth is mainly due to the constant Co atom contribution from the ion beam, and CoSi2 platelet growth is the result of a three-dimensional to two-dimensional growth mode transition.

Keywords

Ion-solid interactionMicrostructureTransmission electron microscopy
Type
Articles
Information
Journal of Materials Research , Volume 20 , Issue 7 , July 2005 , pp. 1758 - 1768
Copyright
Copyright © Materials Research Society 2005

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References

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