Hostname: page-component-586b7cd67f-t7fkt Total loading time: 0 Render date: 2024-11-26T12:44:33.297Z Has data issue: false hasContentIssue false
  • English
  • Français

Improved uniformity and selected area deposition of diamond by the oxy-acetylene flame method

Published online by Cambridge University Press:  31 January 2011

Jesko A. von Windheim  and
Jeffrey T. Glass
Jesko A. von Windheim
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7919
Jeffrey T. Glass
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7919
Get access

Abstract

The role of SiO2 in nucleation of diamond has been investigated in an oxy-acetylene flame. It was found that growth methods that minimize SiO2 formation enhance diamond nucleation. A short pretreatment of a scratched Si surface in a low oxygen-to-acetylene ratio flame, at a distance 1.5 cm from the flame core, significantly improved uniformity of subsequent diamond growth. When scratched surfaces were intentionally oxidized, nucleation of diamond was completely inhibited. By using a mask to controllably deposit SiO2 on a scratched Si surface, highly selective deposition of diamond was achieved with resolution below 5 μm. These results are discussed with reference to competing oxidation and carbon formation processes that take place during the nucleation of diamond. During the nucleation stage, carbon may be deposited on the scratched Si via a route in which the Si surface catalyzes carbon formation reactions that are otherwise kinetically unfavorable. The formation of an oxide layer, on the other hand, would act to passivate the surface, and thus inhibit carbon formation via a catalytic route. The decomposition of CO to C and CO2 is given as an example of a reaction that is favored at temperatures below 1000 K, but requires surface catalysis to proceed because it remains frozen out in the gas phase due to a very slow reaction rate.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 8 , August 1992 , pp. 2144 - 2150
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Hirose, Y., abstract of the 1st Int. Conf. on New Diamond Science and Technology, Tokyo, 1988.Google Scholar
2.Matsui, Y., Yuuki, A., Sahara, M., and Hirose, Y., Jpn. J. Appl. Phys. 28 (9), 1718–1724 (1989).Google Scholar
3.Cappelli, M. A. and Paul, P. H., J. Appl. Phys. 67 (5), 2596–2602 (1990).CrossRefGoogle Scholar
4.Cappelli, M. A., 2nd Int. Conf. on New Diamond Science and Technology, Washington, DC, September 23–27, 1990.Google Scholar
5.Oaks, D. B., Butler, J. E., Snail, K. A., Carrington, W., and Hanssen, L. M., J. Appl. Phys. 69 (4), 2602–2610 (1991).Google Scholar
6.Okada, K., Komatsu, S., Matsumoto, S., and Moriyoshi, Y., J. Cryst. Growth 108, 416–420 (1991).CrossRefGoogle Scholar
7.Tzeng, Y., Cutshaw, C., Phillips, R., Srivinyunon, T., Ibrahim, A., and Loo, B. H., Appl. Phys. Lett. 56 (2), 134–136 (1990).CrossRefGoogle Scholar
8.Ravi, K. V., Koch, C. A., Hu, H. S., and Joshi, A., J. Mater. Res. 5, 2356–2366 (1990).CrossRefGoogle Scholar
9.Ma, J. S., Kawarada, H., Yonehara, T., Suzuki, J-I., Wei, J., Yokota, Y., and Hiraki, A., Appl. Phys. Lett. 55 (11), 1071–1073 (1989).Google Scholar
10.Ma, J. S., Kawarada, H., Yonehara, T., Suzuki, J-I., Wei, J., Yokota, Y., and Hiraki, A., J. Cryst. Growth 99, 1206–1210 (1990).Google Scholar
11.Davidson, J. L., Ellis, C., and Ramesham, R., J. Electron. Mater. 18, 711 (1989).CrossRefGoogle Scholar
12.Ramesham, R., Roppel, T., Ellis, C., Jaworske, D. A., and Baugh, W., J. Mater. Res. 6, 1278–1286 (1991).Google Scholar
13.Gaydon, A. G. and Wolfhard, H. G., Flames: Their Structure Radiation and Temperature (John Wiley and Sons, New York, 1978), Chap. 8.Google Scholar
14.Warnatz, J., Bockhorn, H., Moeser, A., and Wenz, H. W., 19th Int. Symp. on Combustion, Pittsburgh, PA (1983), p. 197.Google Scholar
15.Williams, B. E., presented at American Chemical Society Meeting, New York, NY, August 26–30, 1991.Google Scholar