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High-energy (MeV) ion-beam mixing of Ti with SiC and Si3N4

Published online by Cambridge University Press:  31 January 2011

R. S. Bhattacharya ,
A. K. Rai  and
P. P. Pronko
R. S. Bhattacharya
Affiliation:
Universal Energy Systems, Inc., 4401 Dayton-Xenia Road, Dayton, Ohio 45432
A. K. Rai
Affiliation:
Universal Energy Systems, Inc., 4401 Dayton-Xenia Road, Dayton, Ohio 45432
P. P. Pronko
Affiliation:
Universal Energy Systems, Inc., 4401 Dayton-Xenia Road, Dayton, Ohio 45432
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Abstract

Ion-beam mixing of Ti layers with sintered α-SiC and hot-pressed Si3N4 was measured for 1 McV Au+ at doses of 1X1016 cm−2 and 5X1016 cm−2. Rutherford backscattering (RBS) and cross-section transmission electron microscopy (XTEM) were used to evaluate the mixing. Mixing was observed in Ti/SiC system; however, there was no mixing in Ti/Si3N4 system. Results are discussed in light of the enthalpy of mixing criterion for metal-insulator systems.

Type
Articles
Information
Journal of Materials Research , Volume 2 , Issue 2 , April 1987 , pp. 211 - 215
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

1Metastable Materials Formation by Ion Implantation, edited by Picraux, S. T. and Choyke, W. J. (North-Holland, New York, 1982).Google Scholar
2Proceedings of the 4th International Conference on Ion Beam Modification of Materials, edited by Ullrich, B. M. (North-Holland, Amsterdam, 1984).Google Scholar
3Appleton, B. R., Naramoto, H., White, C. W., Holland, O. W., McHargue, C. J., Farlow, G., Narayan, J., and Williams, J. M., Nucl. In-strum. Methods Phys. Res. B 1, 167 (1984).Google Scholar
4Farlow, G. C., Appleton, B. R., Boatner, L. A.McHargue, C. J., White, C. W., Clark, G. J., and Baglin, J. E. E., Mater. Res. Soc. Symp. Proc. 45, 137 (1985).CrossRefGoogle Scholar
5Narayan, J., Fathy, D., Holland, O. W., Appleton, B. R., Davis, R. F., and Becher, P. F., J. Appl. Phys. 56, 1577 (1984).Google Scholar
6Bhattacharya, R. S., Rai, A. K., and Pronko, P. P. (unpublished).Google Scholar
7Kubaschewski, O., Alcock, C. B., Metallurgical Thermochemistry (Pergamon, New York, 1978), 5th ed.; tables beginning on p. 268.Google Scholar