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Experimental, analytical, and finite element analyses of nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers

Published online by Cambridge University Press:  01 February 2006

C. Chima-Okereke ,
A.J. Bushby ,
M.J. Reece ,
R.W. Whatmore  and
Q. Zhang
C. Chima-Okereke
Affiliation:
Queen Mary, University of London, London E1 4NS, United Kingdom
A.J. Bushby
Affiliation:
Queen Mary, University of London, London E1 4NS, United Kingdom
M.J. Reece*
Affiliation:
Queen Mary, University of London, London E1 4NS, United Kingdom
R.W. Whatmore
Affiliation:
Cranfield University, Cranfield, Bedfordshire MK43 0AL, United Kingdom
Q. Zhang
Affiliation:
Cranfield University, Cranfield, Bedfordshire MK43 0AL, United Kingdom
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

The mechanical properties of lead zirconate titanate (PZT) multilayer systems are needed to model and design micro-electromechanical systems (MEMS) devices. Nanoindentation is a promising tool for obtaining the elastic properties of thin films. However, no means exist to obtain the elastic modulus of the lead zirconate titanate (PZT) in the multilayer system. The indentation modulus versus a/t behavior of the multilayered PZT/Pt/SiO2 film system on a silicon substrate was investigated and compared with finite element models and a new analytical solution. Six different PZT film thicknesses were indented (100, 140, 400, 700, 1500, and 2000 nm), using 5-, 10-, and 20-μm radius indenters. Good agreement was shown between the finite element analysis (FEA) and analytical solutions, and the experimental data. However the behavior of multilayer systems is complex, making deconvolution of properties difficult for films of less than a micron thick.

Keywords

Elastic propertiesFerroelectricFilm
Type
Articles
Information
Journal of Materials Research , Volume 21 , Issue 2 , February 2006 , pp. 409 - 419
Copyright
Copyright © Materials Research Society 2006

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References

REFERENCES

1.Algueró, M., Bushby, A.J. and Reece, M.J.: Direct measurement of mechanical properties of (Pb,La)TiO3 ferroelectric thin films using nanoindentation techniques. J. Mater. Res. 16, 993 (2001).Google Scholar
2.Algueró, M., Bushby, A.J., Hvizdos, P., Reece, M.J., Whatmore, R.W. and Zhang, Q.: Mechanical and electromechanical properties of PZT sol-gel thin films measured by nanoindentation. Integrated Ferroelectrics 41, 53 2001 . Part 1 of 4.Google Scholar
3.Algueró, M., Bushby, A.J. and Reece, M.J.: Anelastic deformation of Pb(Zr,Ti)O3 thin films by non-180° ferroelectric domain wall movements during nanoindentation. Appl. Phys. Lett. 81, 421 (2002).CrossRefGoogle Scholar
4.Tjhen, W., Tamagawa, T., Ye, C-P., Hsueh, C-C., Schiller, P. and Polla, D.L. Properties of piezoelectric thin films for micromechanical devices and systems. IEEE 114 (1991).Google Scholar
5.Cao, H. and Evans, A.G.: Nonlinear deformation of ferroelectric ceramics. J. Am. Ceram. Soc. 76, 890 (1993).CrossRefGoogle Scholar
6.Schäufele, A.B. and Härdtl, K.H.: Ferroelastic properties of lead zirconate titanate ceramics. J. Am. Ceram. Soc. 79, 2637 (1996).CrossRefGoogle Scholar
7.Fett, T., Munz, D. and Thun, G.: Young’s modulus of soft PZT from partial unloading tests. Ferroelectrics 274, 67 (2002).Google Scholar
8.Johnson, K.L.: Contact Mechanics (Cambridge University Press, London, U.K., 1985).Google Scholar
9.Conway, H.D., Farnham, K.A. and Ku, T.C.: The indentation of a transversely isotropic half space by a rigid sphere. J. Appl. Mech. 34, 491 (1967).Google Scholar
10.Swadener, J.G. and Pharr, G.M.: Indentation of elastically anisotropic half-spaces by cones and parabolae of revolution. Philos. Mag. A. 81, 447 (2001).CrossRefGoogle Scholar
11.Menčík, J., Munz, D., Quandt, E., Weppelmann, E.R. and Swain, M.V.: Determination of elastic modulus of thin layers using nanoindentation. J. Mater. Res. 12, 2475 (1997).CrossRefGoogle Scholar
12.Kim, M.T.: Influence of substrates on the elastic reaction of films for the microindentation tests. Thin Solid Films 283, 12 (1996).Google Scholar
13.Hsueh, C-H. and Miranda, P.: Master curves for Hertzian indentation on coating/substrate systems. J. Mater. Res. 19, 94 (2004).CrossRefGoogle Scholar
14.Field, J.S. and Swain, M.V.: A simple predictive model for spherical indentation. J. Mater. Res. 8, 297 (1993).Google Scholar
15.Field, J.S. and Swain, M.V.: Determining the mechanical properties of small volumes of material from submicrometer spherical indentations. J. Mater. Res. 10, 101 (1995).Google Scholar
16.Bushby, A.J.: Nano-indentation using spherical indenters. Nondestructive Testing Eval. 17, 213 (2001).Google Scholar
17.Cohen, R.E., Heifets, E., and Fu, H.: First-principles computation of elasticity of Pb(Zr,Ti)O3: The importance of elasticity in piezoelectrics, in Fundamental Physics of Ferroelectrics, edited by Krakauer, H. (AIP Conf. Proc. 582 New York, 2001), pp. 11–22.Google Scholar
18.Cohen, R.E. and Heifets, E.: Ab initio study of elastic properties of Pb(Zr,Ti)O3, in Fundamental Physics of Ferroelectrics, edited by the American Institute of Physics (AIP Conf. Proc. 626, New York, 2002), pp. 150–159.Google Scholar
19.Jaffe, B., Cook, W. and Jaffe, H.: Piezoelectric Ceramics (Academic Press, London, U.K., 1971).Google Scholar
20.Huber, N., Munz, D. and Tsakmakis, C.: Determination of Young’s modulus by spherical indentation. J. Mater. Res. 12, 2459 (1997).CrossRefGoogle Scholar
21.Komvopoulos, K.: Finite element analysis of a layered elastic solid in normal contact with a rigid surface. J. Tribol. 110, 477 (1988).Google Scholar
22.Ma, D., Xu, K. and He, J.: Numerical simulation for determining the mechanical properties of thin films using depth-sensing indentation technique. Thin Solid Films 323, 183 (1998).Google Scholar
23.Berlincourt, D., Krueger, H.H.A., and Near, C.: Properties of Morgan Electroceramics, Technical publication TP-226, Properties of Electroceramics www.morganelectroceramics.com.pdfs/tp226.pdf (Worcestershire, England; Accessed on 12 April 2003).Google Scholar
24.Brantely, W.A.: Calculated elastic constants for stress problems associated with semiconductor devices. J. Appl. Phys. 44, 534 (1973).Google Scholar
25.Bass, J.D. Elastic properties of minerals, melts, and glasses, in Handbook of Physical Constants, edited by Ahrens, T.J. (American Geophysical Union special publication), pp. 45–63.Google Scholar