Hostname: page-component-78c5997874-dh8gc Total loading time: 0 Render date: 2024-11-19T22:45:48.305Z Has data issue: false hasContentIssue false
  • English
  • Français

The elastic biaxial modulus of Ag–Pd multilayered thin films measured using the bulge test

Published online by Cambridge University Press:  03 March 2011

Martha K. Small ,
Brian J. Daniels ,
Bruce M. Clemens  and
William D. Nix
Martha K. Small
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Brian J. Daniels
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Bruce M. Clemens
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
William D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Get access

Abstract

Analysis and sample preparation techniques for the bulge test have been improved to the point where the test can provide reliable and accurate measurements of the mechanical properties of thin films. Ag-Pd multilayer films of variable bilayer period were prepared for this study and characterized by cross-section transmission electron microscopy and by x-ray methods. The films were tested in the bulge test to determine their biaxial moduli. The data show no peak in biaxial modulus at a critical composition wavelength and no nonlinear elastic behavior. They do show a slight trend toward increasing elastic modulus with increasing strength of (111) crystallographic texture. These findings refute a previous report of the “supermodulus” effect in this system and add to the evidence that the effect is caused by artifacts of the mechanical testing technique. Methods for eliminating such artifacts are discussed.

Type
Articles
Information
Journal of Materials Research , Volume 9 , Issue 1 , January 1994 , pp. 25 - 30
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Yang, W. M. C., Tsakalakos, T., and Hilliard, J. E., J. Appl. Phys. 48 (3), 876 (1977).Google Scholar
2Henein, G. E. and Hilliard, J. E., J. Appl. Phys. 54 (2), 728 (1983).Google Scholar
3Tsakalakos, T. and Hilliard, J. E., J. Appl. Phys. 54 (2), 734 (1983).CrossRefGoogle Scholar
4Itozaki, H., Ph.D. Dissertation, Northwestern University (1982).Google Scholar
5Davis, B. M., Li, D. X., Seidman, D. N., Ketterson, J. B., Bhadra, R., and Grimsditch, M., J. Mater. Res. 7, 1356 (1992).CrossRefGoogle Scholar
6Baker, S. P., Jankowski, A. F., Hong, S., and Nix, W. D., in Thin Films: Stresses and Mechanical Properties II, edited by Doerner, M. F., Oliver, W. C., Pharr, G. M., and Brotzen, F. R. (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 289.Google Scholar
7Small, M. K. and Nix, W. D., J. Mater. Res. 7, 1553 (1992).Google Scholar
8Baker, S. P., Small, M. K., Vlassak, J. J., Daniels, B. J., and Nix, W. D., in Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructwes (NATO Advanced Study Institute, Praia do Porto Novo, Portugal, 1992).Google Scholar
9Vlassak, J. J. and Nix, W. D., J. Mater. Res. 7, 3242 (1992).CrossRefGoogle Scholar
10Small, M. K., Vlassak, J., Powell, S. F., Daniels, B. J., and Nix, W. D., in Thin Films: Stresses and Mechanical Properties IV (Mater. Res. Soc. Symp. Proc, Pittsburgh, PA, 1993), in press.Google Scholar
11Taylor, J. A., J. Vac. Sci. Technol. A 9 (4), 2464 (1991).Google Scholar
12Small, M. K., Ph.D. Dissertation, Stanford University (1992).Google Scholar
13Payne, A. P., Clemens, B. M., and Brennan, S., Rev. Sci. Instrum. 63 (1), 1147 (1992).Google Scholar
14Lin, P. and Senturia, S., in Thin Films: Stresses and Mechanical Properties II, edited by Doerner, M. F., Oliver, W. C., Pharr, G. M., and Brotzen, F. R. (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 41.Google Scholar
15Hong, S., Ph.D. Dissertation, Stanford University (1991).Google Scholar