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The effects of natural convection and conduction in a zone-melting-recrystallization chamber

Published online by Cambridge University Press:  31 January 2011

Bradley D. Heilman ,
Matthew A. Marston ,
Peter Y. Wong  and
Ioannis N. Miaoulis
Bradley D. Heilman
Affiliation:
Thermal Analysis of Materials Processing Laboratory, Mechanical Engineering Department, Tufts University, Medford, Massachusetts 02155
Matthew A. Marston
Affiliation:
Thermal Analysis of Materials Processing Laboratory, Mechanical Engineering Department, Tufts University, Medford, Massachusetts 02155
Peter Y. Wong
Affiliation:
Thermal Analysis of Materials Processing Laboratory, Mechanical Engineering Department, Tufts University, Medford, Massachusetts 02155
Ioannis N. Miaoulis
Affiliation:
Thermal Analysis of Materials Processing Laboratory, Mechanical Engineering Department, Tufts University, Medford, Massachusetts 02155
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Abstract

Zone-melting recrystallization (ZMR) with a graphite strip heater is used to improve the material quality of thin film structures for microelectronic applications. The process takes place in a sealed chamber filled with an inert gas such as argon or helium. The effect of natural convection and conduction at the interface between the gas and film structure was studied both numerically and experimentally. Numerical simulations of the temperature profile in the film structure, and the flow pattern and temperature field in the gas were developed. Experimental observations in a scaled setup using a liquid medium verified the flow patterns calculated from the numerical model of the gas flow in the chamber. Results indicated that the gas is stagnant in the region below the strip heater; consequently, conduction from the strip heater to the wafer is prevalent. Outside the stagnant region, natural convection cools the film structure. These two effects combine to create a steeper thermal gradient across the entire wafer which can increase the thermal stresses in the film. The magnitude of this thermal gradient depends strongly on the thermal diffusivity of the gas. The configuration of the strip heater may significantly affect the amount of heat conduction in the stagnant region.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 3 , March 1993 , pp. 551 - 557
Copyright
Copyright © Materials Research Society 1993

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References

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