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Effect of ion fluence on the surface morphology of single crystal magnesium oxide implanted with xenon

Published online by Cambridge University Press:  03 March 2011

Wenbiao Jiang ,
M. Grant Norton  and
David B. Poker
Wenbiao Jiang
Affiliation:
Department of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164-2920
M. Grant Norton*
Affiliation:
Department of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164-2920
David B. Poker
Affiliation:
Surface Modification and Characterization Research Facility, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831
*
a)Author to whom all correspondence should be addressed.
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Abstract

The surface morphology (001)-oriented single-crystal magnesium oxide (MgO) implanted with xenon ions has been examined using atomic force microscopy. It was found that at the lowest fluence used in this study (1.0 × 1014/cm2), a slight roughening of the (001) surface occurred. The magnitude of this roughening remained fairly constant with increases in fluence in the range 1.0 × 1014/cm2 to 3.0 × 1016/cm2. Implantation at fluences of ≥ 1.0 × 1017/cm2 caused significant surface roughening with the concomitant formation of micron-sized blisters. The appearance of some of these blisters resembles the rosette pattern that is also observed when the cleaved surfaces of MgO crystals are etched following indentation using a spherical indenter. This observation suggests that these blisters are formed by the growth of xenon inclusions, during implantation, by a dislocation loop punching mechanism.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 11 , November 1995 , pp. 2823 - 2828
Copyright
Copyright © Materials Research Society 1995

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References

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