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Effect of film composition on the orientation of (Ba,Sr)TiO3 grains in (Ba,Sr)yTiO2+ythin films

Published online by Cambridge University Press:  31 January 2011

Debra L. Kaiser ,
Mark D. Vaudin ,
Lawrence D. Rotter ,
John E. Bonevich ,
Igor Levin ,
John T. Armstrong ,
Alexander L. Roytburd  and
Darrell G. Schlom
Debra L. Kaiser
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Mark D. Vaudin
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Lawrence D. Rotter
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
John E. Bonevich
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Igor Levin
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
John T. Armstrong
Affiliation:
Chemical Science and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Alexander L. Roytburd
Affiliation:
Department of Materials and Nuclear Engineering, University of Maryland, College Park, Maryland 20742
Darrell G. Schlom
Affiliation:
Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802–5005
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Thin films of composition (Ba,Sr)yTiO2+y with 0.43 ≤ y ≤; 1.64, were deposited by metalorganic chemical vapor deposition on (100) MgO substrates at various growth conditions. X-ray diffraction and transmission electron microscopy studies showed that the films were composed of epitaxial Ba1–xSrxTiO3 (x ≈0.06) grains and an amorphous phase. The orientation of the tetragonal Ba1–xSrxTiO3 grains (pure a axis, pure c axis, or a mix of the two) was found to be strongly dependent upon film composition. This composition dependence is explained for the majority of the Ti-rich films by an analysis of average strains in the two-phase films, assuming a compressive strain of ≈1% in the amorphous phase.

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Articles
Information
Journal of Materials Research , Volume 14 , Issue 12 , December 1999 , pp. 4657 - 4666
Copyright
Copyright © Materials Research Society 1999

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