Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-23T03:35:44.788Z Has data issue: false hasContentIssue false
  • English
  • Français

The deposition of α–Fe2O3 by aerosol chemical vapor deposition

Published online by Cambridge University Press:  03 March 2011

A. Martínez ,
J. Peña ,
M. Labeau ,
J.M. González-Calbet  and
M. Vallet-Regí
A. Martínez
Affiliation:
Departamento de Química Inorgánica y Bioinorgánica, Facultad de Farmacia, Universidad Complutense, 28040 Madrid, Spain
J. Peña
Affiliation:
Departamento de Química Inorgánica y Bioinorgánica, Facultad de Farmacia, Universidad Complutense, 28040 Madrid, Spain and Instituto de Magnetismo Aplicadu “Salvador Velayos”, Apdo. Correos 155, Las Rozas, 28230 Madrid, Spain
M. Labeau
Affiliation:
Laboratoire des Matériaux et du Génie Physique, URA 1109, CNRS, INPG, BP 46, 38402-Saint Martin D'Heres, France
J.M. González-Calbet
Affiliation:
Instituto de Magnetismo Aplicado “Salvador Velayos”, Apdo. Correos 155, Las Rozas, 28230 Madrid, Spain and Departamento de Química Inorgánica, Fucultad de Químicas, Universidad Complutense, 28040 Madrid, Spain
M. Vallet-Regí*
Affiliation:
Departamento de Química Inorgánica y Bioinorgánica, Facultad de Farmacia, Universidad Complutense, 28040 Madrid, Spain and Instituto de Magnetismo Aplicado “Salvador Velayos”, Apdo. Correos 155, Las Rozas, 28230 Madrid, Spain
*
a)Author to whom correspondence should be addressed.
Get access

Abstract

α-Fe2O3 thin films have been deposited on Si(111) substrates at high temperatures (600–800 °C) by the spray pyrolysis method. Four different iron(III) β-diketonates have been used as precursors in order to obtain polycrystalline films of good adherence, which have been characterized by x-ray diffraction, scanning electron microscopy, and magnetic measurements.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 5 , May 1995 , pp. 1307 - 1311
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Tang, Z. X., Nafis, S., Sorensen, C. M., Hadjipanayis, G. C., and Klabunde, K. J., J. Mag. Mag. Mater. 80, 285–289 (1989).CrossRefGoogle Scholar
2Cabañas, M. V., Vallet-Regí, M., Labeau, M., and González-Calbet, J. M., J. Mater. Res. 8, 2694–2701 (1993).CrossRefGoogle Scholar
3Langlet, M., Labeau, M., Bochu, B., and Joubert, J. C., IEEE Trans. Mag. MAG22(3), 151–156 (1986).CrossRefGoogle Scholar
4Nakatani, Y., Sakai, M., and Matsuoka, M., Jpn. J. Appl. Phys. 22, 912–916 (1983).CrossRefGoogle Scholar
5Cantalini, C. and Pelino, M., J. Am. Ceram. Soc. 75(3), 546–551 (1992).CrossRefGoogle Scholar
6Eguchi, K., Cauhape, J. S., Menil, P., Lucas, C., and Videau, J.J., Sensors and Actuators 17, 319–325 (1989).CrossRefGoogle Scholar
7Joshi, S., Nawathey, R., Koinkar, V. N., Godbole, V. P., Chaudhari, S. M., and Ogale, S.B., J. Appl. Phys. 64(10), 5647 (1988).CrossRefGoogle Scholar
8Lin, J. K., Sivertsen, J. M., and Judy, J. H., IEEE Trans. Magn. MAG22, 50 (1986).Google Scholar
9Kordas, G. and Weeks, R. A., J. Appl. Phys. 57(10), 3812 (1985).CrossRefGoogle Scholar
10Guori, D., Lihua, C., Bailang, Y., and Mingdeng, L., J. Phys. IV, Colloque C2, Suppl. au J. Phys. II 1, 233–239 (1991).Google Scholar
11Qian, Y-T., Niu, C-M., Hanning, C., Yang, S., Dwight, K., and Wold, A., J. Solid State Chem. 92, 208–212 (1991).CrossRefGoogle Scholar
12Berry, A. D., Gaskill, D. K., Holm, R. T., Cukaskas, E. J., Kaplan, R., and Henry, R.L., Appl. Phys. Lett. 52, 1743–1745 (1988).CrossRefGoogle Scholar
13Donahue, E. J. and Schleich, D. M., J. Appl. Phys. 71(12), 6013–6017 (1992).CrossRefGoogle Scholar
14Vallet-Regí, M., Labeau, M., Garcia, E., Cabañas, M.V., González-Calbet, J.M., and Delabouglise, G., Physica C 180, 57–60 (1991).CrossRefGoogle Scholar
15Hubert-Pfalzgraf, L.G., Massiani, M. C., Papiernik, R., and Poncelet, O., Colloque de physique, Complement au colloque C5, Suppl. au no. 5 50, 981–989 (1989).Google Scholar
16Thornton, D. A., Coordination Chem. Rev. 104, 173–249 (1990).CrossRefGoogle Scholar
17ASTM powder diffraction file 33–664.Google Scholar
18Okuyama, K., Kousaka, Y., Tohge, N., and Adachi, M., J. Mater. Sci. Lett. 6, 1466–1468 (1987).CrossRefGoogle Scholar