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Self-heating phenomena in high-power III-N transistors and new thermal characterization methods developed within EU project TARGET

Published online by Cambridge University Press:  07 July 2009

Jan Kuzmik*
Affiliation:
Institute for Solid-State Electronics, TU Vienna, Floragasse 7, A-1040 Vienna, Austria. Phone: +43 1 58801 36215; Fax: +43 1 58801 362 99. Institute of Electrical Engineering, Slovak Academy of Science, Dubravska cesta 9, 842 39 Bratislava, Slovakia.
Sergey Bychikhin
Affiliation:
Institute for Solid-State Electronics, TU Vienna, Floragasse 7, A-1040 Vienna, Austria. Phone: +43 1 58801 36215; Fax: +43 1 58801 362 99.
Emmanuelle Pichonat
Affiliation:
LASIR UMR 8516 USTL, 59655 Villeneuve d'Ascq cedex, France.
Christophe Gaquière
Affiliation:
IEMN, av. Poincaré, BP 69, 59652 Villeneuve d'Ascq, France.
Erwan Morvan
Affiliation:
Alcatel-Thales III-V Lab/TIGER, 91404 Orsay, France.
Erhard Kohn
Affiliation:
Department of Electron Devices and Circuits, University of Ulm, 89081 Ulm, Germany.
Jean-Pierre Teyssier
Affiliation:
IRCOM CNRS University of Limoges, 7 rue Jules Valles, 19100 Brive, France.
Dionyz Pogany
Affiliation:
Institute for Solid-State Electronics, TU Vienna, Floragasse 7, A-1040 Vienna, Austria. Phone: +43 1 58801 36215; Fax: +43 1 58801 362 99.
*
Corresponding author: J. Kuzmik Email: [email protected]

Abstract

In the framework of the Top Amplifier Research Groups in a European Team (TARGET) project, we developed a new electrical method for the temperature measurement of HEMTs and performed several unique studies on the self-heating effects in AlGaN/GaN HEMTs. This method, in combination with transient interferometric mapping (TIM), provides a fundamental understanding of the heat propagation in a transient state of HEMTs. The AlGaN/GaN/Si HEMT thermal resistance was determined to be ~70 K/W after 400 ns from the start of a pulse, and the heating time constant was ~200 ns. Our experimental methods were further applied on multifinger high-power AlGaN/GaN/sapphire HEMTs. The TIM method indicates that the airbridge structure serves as a cooler, removing approximately 10% of the heat energy. In the next study we used TIM and the micro-Raman technique to quantify thermal boundary resistance (TBR) between different wafer materials and GaN epi-structure. We found TBR to be ~7 × 10−8 m2K/W for GaN/Si and ~1.2 × 10−7 m2K/W for GaN/SiC interfaces. The role of TBR at the GaN/sapphire interface was found to be less important.

Type
Original Article
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2009

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References

REFERENCES

[1]Shin, M.W.; Trew, R.J.: GaN MESFETs for high-frequency and high-temperature microwave applications. Electronics Letters., 31 (1995), 498500.CrossRefGoogle Scholar
[2]Daumiller, I.; Kirchner, C.; Kamp, M.; Ebeling, K.J.; Kohn, E.: Evaluation of the temperature stability of AlGaN/GaN heterostructure FET's. IEEE Electron Device Lett., 20 (1999), 448450.CrossRefGoogle Scholar
[3]Kohn, E.; Daumiller, I.; Kunze, M.; Nostrand, J.; Van Sewell, J.; Jenkins, T.: Switching behaviour of GaN-based HFETs: thermal and electronics transients. Electron. Lett., 38 (2002), 603605.CrossRefGoogle Scholar
[4]Kohn, E. et al. : Transient characteristics of GaN-based heterostructure field-effect transistors. IEEE Trans. Microwave Theory Tech., 51 (2003), 634641.CrossRefGoogle Scholar
[5]Gaska, R.; Osinsky, A.; Yang, J.W.; Shur, M.S.: Self-heating in high-power AlGaN-GaN HFET's. IEEE Electron Device Lett., 19 (1998), 8991.CrossRefGoogle Scholar
[6]Zhao, Y. et al. : Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminium nitride thin films. J. Appl. Phys., 96 (2004), 45634568.CrossRefGoogle Scholar
[7]Filippov, K.A.; Balandin, A.A.: The effect of the thermal boundary resistance on self-heating of AlGaN/GaN HFETs. MRS Internet J. Nitride Semiconductor Res. [Online]. 8, article 4. Avaliable at: http://nsr.mij.mrs.org/8/4/, (2003).CrossRefGoogle Scholar
[8]Turin, V.O.; Balandin, A.A.: Performance degradation of GaN field-effect transistors due to thermal boundary resistance at GaN/substrate interface. Electron. Lett., 40 (2004), 8183.CrossRefGoogle Scholar
[9]Eckhause, T.A.; Süzer, Ö.; Kurdak, C.; Yun, F.; Morkoc, H.: Electric-field-induced heating and energy relaxation in GaN. Appl. Phys. Lett., 82 (2003), 30353037.CrossRefGoogle Scholar
[10]Liu, R.; Ponce, F.A.; Dadgar, A.; Krost, A.: Atomic arrangement at the AlN/Si (111) interface. Appl. Phys. Lett., 83 (2003), 860862.CrossRefGoogle Scholar
[11]Sun, J. et al. : Thermal Management of AlGaN-GaN HFETs on sapphire using flip-chip bonding with epoxy underfill. IEEE Electron Dev. Lett., 24 (2003), 375377.CrossRefGoogle Scholar
[12]Das, J. et al. : Improved thermal performance of AlGaN/GaN HEMTs by an optimized flip-chip design. IEEE Trans. Electron Devices, 53 (2006), 26962702.CrossRefGoogle Scholar
[13]Kuball, M. et al. : Measurement of temperature distribution in multifinger AlGaN/GaN heterostructure field-effect transistors using micro-Raman spectroscopy. Appl. Phys. Lett., 82 (2003), 124126.CrossRefGoogle Scholar
[14]Shigekawa, N.; Onodera, K.; Shiojima, K.: Device Temperature measurement of highly biased AlGaN/GaN high-electron-mobility transistors. Jpn. J. Appl. Phys., 42 (2003), 22452249.CrossRefGoogle Scholar
[15]Kuzmík, J.; Pogany, D.; Gornik, E.; Javorka, P.; Kordoš, P.: Electrostatic discharge effects in AlGaN/GaN high-electron-mobility transistors. Appl. Phys. Lett., 83 (2003), 46554657.CrossRefGoogle Scholar
[16]Park, J.; Shin, M.W.; Lee, Ch.C.: Thermal modeling and measurement of AlGaN-GaN HFETs built on sapphire and SiC substrates. IEEE Trans. Electron Devices, 51 (2004), 17531759.CrossRefGoogle Scholar
[17]Kuzmík, J.; Javorka, P.; Alam, A.; Marso, M.; Heuken, M.; Kordoš, P.: Determination of channel temperature in AlGaN/GaN HEMTs grown on sapphire and silicon substrates using DC characterization method. IEEE Trans. Electron Devices, 49 (2002), 14961498.CrossRefGoogle Scholar
[18]Brown, J.D.; Borges, R.; Piner, E.; Vescan, A.; Singhal, S.; Therrien, R.: AlGaN/GaN HFETs fabricated on 100-mm GaN on silicon (111) substrates. Solid-State Electronics., 46 (2002), 15351539.CrossRefGoogle Scholar
[19]Pogany, D. et al. : Quantitative internal thermal energy mapping of semiconductor devices under short current stress using backside laser interferometry. IEEE Trans. Electron Devices, 49 (2002), 20702078.CrossRefGoogle Scholar
[20]Pogany, D.; Bychikhin, S.; Litzenberger, M.; Groos, G.; Stecher, M.: Extraction of spatio-temporal distribution of power dissipation in semiconductor devices using nanosecond interferometric mapping technique. Appl. Phys. Lett., 81 (2002), 28812883.CrossRefGoogle Scholar
[21]Kuzmik, J. et al. : Transient thermal characterization of AlGaN/GaN HEMTs Grown on silicon. IEEE Trans. Electron Devices, 52 (2005), 16981705.CrossRefGoogle Scholar
[22]Kuzmik, J. et al. : Transient self-heating efects in multifinger AlGaN/GaN HEMTs with metal airbridges. Solid-State Electronics, 51 (2007), 969974.CrossRefGoogle Scholar
[23]Kuzmik, J.; Bychikhin, S.; Pogany, D.; Gaquière, C.; Pichonat, E.; Morvan, E.: Investigation of the thermal boundary resistance at the III-nitride/substrate interface using optical methods. J. Appl. Phys., 101 (2007), 054508.CrossRefGoogle Scholar
[24]Pichonat, E. et al. : Temperature analysis of AlGaN/GaN high-electron-mobility transistors using micro-Raman scattering spectroscopy and transient interferometric mapping. European Microwave Week, Manchester, 10–15 September (2006).Google Scholar
[25]Balkanski, M.; Wallis, R.F.; Haro, E.: Anharmonic effects in light scattering due to optical phonons in silicon. Phys. Rev. B, 28 (1983), 19281934.CrossRefGoogle Scholar
[26]Hull, R, editor, Properties of Crystalline Silicon. EMIS Datareviews Series No. 20, INSPEC, 1999.Google Scholar