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The low-complexity RF MEMS switch at EADS: an overview

Published online by Cambridge University Press:  03 August 2011

Bernhard Schoenlinner ,
Armin Stehle ,
Christian Siegel ,
William Gautier ,
Benedikt Schulte ,
Sascha Figur ,
Ulrich Prechtel  and
Volker Ziegler
Bernhard Schoenlinner*
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Armin Stehle
Affiliation:
EADS Cassidian Electronics, Woerthstrasse 85, 89077 Ulm, Germany.
Christian Siegel
Affiliation:
EPCOS AG, a TDK EPC Group Company, Anzingerstrasse 13, 81671 München, Germany.
William Gautier
Affiliation:
EADS Cassidian Electronics, Woerthstrasse 85, 89077 Ulm, Germany.
Benedikt Schulte
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Sascha Figur
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Ulrich Prechtel
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Volker Ziegler
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
*
Corresponding author: B. Schoenlinner Email: [email protected]
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Abstract

This paper gives an overview of the low-complexity radio frequency microelectromechanical systems (RF MEMS) switch concept and technology of EADS Innovation Works in Germany. Starting in 2003, a capacitive switch concept, which is unique in several aspects, was developed to address specific needs in the aeronautic and space. Thermally grown silicon oxide as dielectric layer, the silicon substrate as actuation electrode, and a conductive zone realized by ion implantation make the EADS RF MEMS switch a very simple, low-cost, and reliable approach. In this document, data on experimental investigations are presented, which demonstrate outstanding performance figures in terms of insertion loss, isolation, frequency range, bandwidth, RF-power handling, and robustness with respect to thermal load. Based on this concept, numerous different circuits in particular single-pole single-throws (SPSTs), single-pole multi-throws (SPMTs), tunable filters, phase shifters, and electronically steerable antennas between 6 and 100 GHz have been designed, fabricated, and characterized.

Keywords

Microelectromechanical systemsMicroelectromechanical devicesTunable circuits and devicesSwitchesMicrowave circuits
Type
Tutorial and Review Paper
Information
International Journal of Microwave and Wireless Technologies , Volume 3 , Special Issue 5: RF MEMS , October 2011 , pp. 499 - 508
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2011

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