Lithographical bending control method for a piezoelectric actuator
Published online by Cambridge University Press: 06 March 2009
Abstract
This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
- Type
- Original Article
- Information
- International Journal of Microwave and Wireless Technologies , Volume 1 , Issue 1 , February 2009 , pp. 37 - 42
- Copyright
- Copyright © Cambridge University Press and the European Microwave Association 2009
References
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