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New developments in coordinate measuring machines formanufacturing industries

Published online by Cambridge University Press:  22 September 2014

S. Hammad Mian  and
A. Al-Ahmari
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Abstract

There have been substantial improvements in measurement systems in order to meetfluctuating market demands. This rapid change and development in measurement technologyhas primarily been governed by demands of accuracy and precision from aerospace,automotive and other manufacturing industries. Coordinate measuring machines (CMMs)available with different technologies and configurations has efficiently been fulfillingcustomer demands for more than a decade. Though, current CMMs can meet needs of rapid andincreased demands of customers to a greater extent but still there is lot of scope forimprovement and development in CMMs. The globalization of manufacturing has resulted indevelopment of variety of complex products and miniaturization of mechanical components.The technology of micro/nano-scale 3D measurement is still a bottleneck for industries.Therefore, precise and accurate system which is flexible enough to deal with complexitiesof parts and micro & nano range products has to be investigated. In this paper,comprehensive review concerning CMMs with capabilities to measure micro/nano features hasbeen presented. This work has also discussed different methods to estimate measurementuncertainty, as well as performance evaluation of CMMs. Moreover, novel concepts such asintelligent CMM, multi-sensor CMM, virtual CMM have been presented.

Keywords

Coordinate measuring machine (CMM)uncertaintyintelligent CMMmicro/nano CMMvirtual CMMmulti-sensor CMM
Type
Research Article
Information
International Journal of Metrology and Quality Engineering , Volume 5 , Issue 1 , 2014 , 101
Copyright
© EDP Sciences 2014

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References

Wozniak, A., New method for testing the dynamic performance of CMM scanning probes, IEEE Trans. Instrum. Meas. 56, 2767–2774 (2006) CrossRefGoogle Scholar
Baldwin, J.M., Summerhays, K.D., Campbell, D.A., Henke, R.P., Application of simulation software to coordinate measurement uncertainty evaluations, Measure 2, 40–52 (2007) Google Scholar
JCGM 100:2008, Evaluation of measurement data - Guide to the expression of uncertainty in measurement, (GUM) 1st edn. (Joint Committee for Guides in Metrology (JCGM), Bureau International des Poids et Mesures, Sèvres, 2008), 120 p.
Taylor, B.N., Kuyatt, C.E., The new NIST policy on statements of uncertainty, CRTD, International forum on dimensional tolerancing and metrology, ASME 27, 79–83 (1993) Google Scholar
Wilhelm, R.G., Hocken, R., Schwenke, H., Task Specific Uncertainty in Coordinate Measurement, CIRP Ann. Manuf. Technol. 50, 553–563 (2001) CrossRefGoogle Scholar
Weckenmann, A., Knauer, M., Killmaier, T., Uncertainty of coordinate measurements on sheet-metal parts in the automotive industry, J. Mater. Proc. Technol. 115, 9–13 (2001) CrossRefGoogle Scholar
S.D. Phillips, B. Borchardt, A.J. Abackerli, C. Shakarji, D. Sawyer, The validation of CMM task specific measurement uncertainty software, Proceedings of the ASPE summer tropical meeting – CMMs (American Society for Precision Engineering – ASPE, Charlotte, 2003), pp. 1-6
S. Venkatachalam, B. Uppiliappan, J. Raja, Evaluation of task specific uncertainty for CMM measurements (2002), http://www.aspe.net/publications/annual˙2002/pdf/posters/2metro/5measu/880.pdf
Butler, C., An investigation into the performance of probes on coordinate measuring machines, Ind. Metrol. 2, 59–70 (1991) CrossRefGoogle Scholar
Achiche, S., Wozniak, A., Three-dimensional modeling of coordinate measuring machines probing accuracy and settings using fuzzy knowledge bases: Application to TP6 and TP200 triggering probes, Artificial Intelligence for Engineering Design, Analysis and Manufacturing 26, 425–441 (2012) Google Scholar
Ren, M.J., Cheung, C.F., Kong, L.B., A task specific uncertainty analysis method for least-squares-based form characterization of ultra-precision freeform surfaces, Meas. Sci. Technol. 23, 054005 (2012) CrossRefGoogle Scholar
Zhang, G., Veale, R., Charlton, T., Borchardt, B., Hocken, R., Error Compensation of Coordinate Measuring Machines’, CIRP Ann. Manuf. Technol. 34, 445–448 (1985) CrossRefGoogle Scholar
Huang, P.S., Ni, J., On-line error compensation of Coordinate Measuring Machines’, Int. J. Machine Tools Manuf. 35, 725–738 (1995) CrossRefGoogle Scholar
G. Hermann, Volumetric Error Correction in Coordinate Measurement, in 4th Serbian-Hungarian Joint Symposium on Intelligent Systems (SISY 2006), Subotica, Serbia, September 29-30, 2006, pp. 409-416
Che, C., Ni, J., A generic coordinate transformation uncertainty assessment approach and its application in machine vision metrology, Int. J. Machine Tools Manuf. 38, 1241–1256 (1998) CrossRefGoogle Scholar
Kruth, J.P., Vanherck, P.C., Van den Bergh, C., Compensation of static and transient thermal errors on CMMs, CIRP Ann. Manuf. Technol. 50, 377–380 (2001) CrossRefGoogle Scholar
Teeuwsen, J.W.M.C., Soons, J.A., Schellekens, P.H.J., A general method for error description of CMMs using polynomial fitting procedures, CIRP Ann. Manuf. Technol. 38, 505–510 (1989) CrossRefGoogle Scholar
Kim, K.D., Chung, S.C., Accuracy improvement of the On-Machine inspection system by correction of geometric and transient thermal errors, Trans. NAMRI/SME 31, 209–216 (2003) Google Scholar
Jakubiec, W., Analytical estimation of uncertainty of coordinate measurements of geometric deviations using models based on distance between point and straight line, Adv. Manuf. Sci. Technol. 33, 45–53 (2009) Google Scholar
Samuel, G.L., Shunmugam, M.S., Evaluation of circularity and sphericity from coordinate measurement data’, J. Mater. Proc. Technol. 139, 90–95 (2003) CrossRefGoogle Scholar
C.M. Shakarji, J. Raffaldi, Evaluating coordinate measuring machine software geometry uncertainties using national and international standards, in Measurement Science Conference Anaheim, California, USA, January 12-16, 2004
Techniques of Determining the Uncertainty of Measurement in Coordinate Metrology, ISO Technical Report 15530–1 (draft), July 16, 1998
Cauchick-Miguel, P., Kinga, T., Davis, J., CMM verification: a survey’, Measurement 17, 1–16 (1996) CrossRefGoogle Scholar
Singhose, W.E., Searing, W.P., Singer, N.C. Improving repeatability of coordinate measuring machines with shaped command signals’, Precis. Eng. 18, 138–146 (1996) CrossRefGoogle Scholar
Hansen, H.N., De Chiffre, L., A Combined Optical and Mechanical Reference Artefact for Coordinate Measuring Machines, CIRP Ann. Manuf. Technol. 46, 467–470 (1997) CrossRefGoogle Scholar
L. Arriba, E. Trapet, M. Bartscher, M. Franke, A. Balsamo, G. Costelli, S. Torre, F. Kitzsteiner, F. San Martín, in Methods and artefacts to calibrate large CMMs Proceedings of the 1st International EUSPEN conference, Bremen, 1999, pp. 391–394
Abbe, M., Takamasu, K., Ozono, S., Reliability on calibration of CMM, Measurement 33, 359–368 (2003) CrossRefGoogle Scholar
Curran, E., Phelan, P., Quick check error verification of coordinate measuring machines, J. Mater. Proc. Technol. 155–156, 1207–1213 (2004) CrossRefGoogle Scholar
G. Sansoni, S. Carmignato, E. Savio, Validation of the Measurement Performance of a Three-Dimensional Vision Sensor by means of a Coordinate Measuring Machine, in Proc. of IMTC, IEEE, Como, Italy, 2003, pp. 773–778
De Chiffre, L., Hansen, H.N., Morace, R.E., Comparison of Coordinate Measuring Machines using an optomechanical hole plate, CIRP Ann. Manuf. Technol. 54, 479–482 (2005) CrossRefGoogle Scholar
Weckenmann, A., Lorz, J., Monitoring coordinate measuring machines by calibrated parts, J. Phys.: Conf. Ser. 13, 190–193 (2005) Google Scholar
A. Woźniak, Testing of the repeatability of stylus change of modular probes used in Coordinate Measuring Machines, in XIX IMEKO World Congress Fundamental and Applied Metrology September 6−11, Lisbon, Portugal, 2009
Zhang, G., Ouyang, R., Lu, B., A Displacement Method for Machine Geometry Calibration, Ann. CIRP 37, 515–518 (1998) CrossRefGoogle Scholar
Savio, E., Hansen, H.N., De Chiffre, L., Approaches to the calibration of freeform artefacts on coordinate measuring machines, Ann. CIRP 51, 433–436 (2002) CrossRefGoogle Scholar
Lim, C.K., Burdekin, M., Rapid volumetric calibration of coordinate measuring machines using a hole bar artefact, Proc. Institut. Mech. Eng. B: J. Eng. Manuf. 216, 1083–1093 (2002) CrossRefGoogle Scholar
Barakat, N.A., Elbestawi, M.A., Spence, A.D., Kinematic and geometric error compensation of a coordinate measuring machine’, Int. J. Machine Tools Manuf. 40, 833–850 (2000) CrossRefGoogle Scholar
Schwenke, H., Franke, M., Hannaford, J., Kunzmann, H., Error mapping of CMMs and machine tools by a single tracking interferometer’, CIRP Ann. Manuf. Technol. 54, 475–478 (2005) CrossRefGoogle Scholar
Agapiou, J.S., Du, H., Assuring the Day-to-Day Accuracy of Coordinate Measuring Machines – A Comparison of Tools and Procedures’, J. Manuf. Proc. 9, 109–120 (2007) CrossRefGoogle Scholar
Silva, J.B., Hocken, R.J., Miller, J.A., Caskey, G.W., Ramu, P., Approach for uncertainty analysis and error evaluation of four-axis co-ordinate measuring machines, Int. J. Adv. Manuf. Technol. 41, 130–1139 (2009) Google Scholar
Carmignato, S., Experimental study on performance verification tests for coordinate measuring systems with optical distance sensors, Proc. SPIE 7239, 1–10 (2009) Google Scholar
Muelaner, J.E., Wang, Z., Martin, O., Jamshidi, J., Maropoulos, P.G., Estimation of uncertainty in three-dimensional coordinate measurement by comparison with calibrated points, Meas. Sci. Technol. 21, 025106 (2010) CrossRefGoogle Scholar
Acko, B., McCarthy, M., Haertig, F., Buchmeister, B., Standards for testing freeform measurement capability of optical and tactile coordinate measuring machines, Meas. Sci. Technol. 23, 094013 (2012) CrossRefGoogle Scholar
G.N. Peggs, A. Lewis, R.K. Leach, Measuring in three dimensions at the mesoscopic level, in Proceedings of ASPE winter topical meeting-machines and processes for micro-scale and mesoscale fabrication, metrology and assembly, FL, USA, 2003, pp. 53–57
http://www.nanocmm.eu/
K. Takamasu, S. Ozawa, T. Asano, A. Suzuki, R. Furutani, S. Ozono, Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), in Japan-China Bilateral Symposium on Advanced Manufacturing Engineering, 1996, pp. 155–158
Jager, G., Three-dimensional nanopositioning and nanomeasuring machine with a resolution of 0.1 nm, Optoelectronics, Instrum. data Proc. 46, 318–323 (2010) Google Scholar
Haitjema, H., Pril, W.O., Schellekens, P., Development of a silicon-based nanoprobe system for 3-D measurements, Ann. CIRP 50, 65–368 (2001) CrossRefGoogle Scholar
Hocken, R.J., Trumper, D.L., Wang, C., Dynamics and control of the UNCC/MIT sub-atomic measuring machine, CIRP Ann. Manuf. Technol. 50, 373–376 (2001) CrossRefGoogle Scholar
Fan, K.C., Fei, Y.T., Yu, X.F., Wang, W.L., Chen, Y.J., Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages, Robot. Comput. Integrated Manuf. 23, 276–284 (2007) CrossRefGoogle Scholar
M. Fujiwara, K. Takamasu, S. Ozono, Evaluation of properties of nano-CMM by thermal drift and tilt angle, in Proceedings XVII IMEKO World Congress, June 22–27, Dubrovnik, Croatia,, 2003, pp. 1794–1797
http://www.micromanufacturing.com/content/micronano-cmm-3-d-objects
Fan, K.C., Fei, Y.T., Yu, X.F., Chen, Y.J., Wang, W.L., Chen, F., Liu, Y.S., Development of a low-cost micro-CMM for 3D micro/nano measurements, Meas. Sci. Technol. 17, 524–532 (2006) CrossRefGoogle Scholar
G. Hermann, Design consideration for a modular high precision Coordinate Measuring Machine, ICM 2006, in IEEE International Conference on Mechatronics, July 3-5, Budapest, Hungary, 2006, pp. 161–165
T.A.M. Ruijl, Ultra Precision Coordinate Measuring Machine, Ph.D. thesis, Delft University of Technology, 2001
U. Brand, T. Kleine-Besten, H. Schwenke, Development of a special CMM for dimensional metrology on micro-system components, ASPE 15 (2000)
M. Vermeulen, High-Precision 3D-Coordinate Measuring surface and high accuracy displacement sensors, Ph.D. thesis, Eindhoven University of Technology, 1999
E.C. Teague, The National Institute of Standards and Technology molecular measuring machine project: Metrology and precision engineering design, J. Vac. Sci. Technol. B 7, (1989)
J. Kramar, J. Jun, W. Penzes, F. Scire, C. Teague, J. Villarrubia, E. Amatucci, D. Gilsinn, The molecular measuring machine, Precision Engineering Division (National Institute of Standards and Technology, Gaithersburg, USA)
S. Cao, W. Habler-Grohne, U. Brand, S. Gao, R. Wilke, S. Buttgenbach, Three-dimensional measurement system with micro-tactile sensor, Proc. SPIE 4902 (2002)
Dai, G., Bütefisch, S., Pohlenz, F., Danzebrink, H.U., A high precision micro/nano CMM using piezoresistive tactile probes, Meas. Sci. Technol. 20, 084001 (2009) CrossRefGoogle Scholar
G. Dai, S. Bütefisch, F. Pohlenz, H.-U. Danzebrink, J. Fluegge, True 3D measurements of micro and nano structures, 56th International scientific colloquium, Ilmenau University of Technology, 12–16 September 2011
Z. Wu, T. Guo, J. Chen, X. Fu, X. Hu, The measurement of optical reflector with complex surface using nano-CMM, Proc. SPIE 8557, Optical Design and Testing V, November 26, 2012
Zhang, G.X., Liu, S.G., Ma, X.H., Wang, J.L., Wu, Y.Q., Li, Z., Towards the Intelligent CMM, CIRP Ann. Manuf. Technol. 51, 437–442 (2002) CrossRefGoogle Scholar
Roy, U., Xu, Y., Wang, L., Development of an intelligent inspection planning system in an object oriented programming environment, Comput. Integrated Manuf. Syst. 7, 240–246 (1994) CrossRefGoogle Scholar
Menq, C.H., Yau, H.T., Wong, C.L., An intelligent planning environment for automated dimensional inspection using coordinate measuring machines, ASME J. Eng. Ind. 114, 222–230 (1992) Google Scholar
Fan, K.C., Leu, M.C., Intelligent planning of CAD-directed inspection for coordinate measuring machines, Comput. Integrat. Manuf. Syst. 11, 43–51 (1998) CrossRefGoogle Scholar
A.J. Spyridi, A.A.G. Requicha, Automatic programming of coordinate measuring machines, in IEEE Proceedings of International Conference on Robotics and Automation, USA, 1994, pp. 1107–1112
Y. Fang, K. Chen, Z. Lin, Stereo vision and CMM-integrated intelligent inspection system in reverse engineering, Proc. SPIE 3521, Machine Vision Systems for Inspection and Metrology VII, October 6, 1998
B. Yuewei, W. Shuangyu, L. Kai, W. Xiaogang, A strategy to automatically planning measuring path with CMM offline’, in International Conference on Mechanic Automation and Control Engineering (MACE, 2010), Shanghai, China, pp. 3064–3067
S.N. Spitz, A.A.G. Requicha, Multiple-goals path planning for coordinate measuring machines, Proceedings of IEEE International Conference on Robotics & Automation 2000, San Francisco, CA, USA, pp. 2322–2327
C.G. Lu, D. Morton, P. Myle, M.H. Wu, An artificial intelligent (AI) inspection path management for multiple tasks measurement on co-ordinate measuring machine (CMM): an application of neural network technology, in Proceedings of IEEE Engineering Management Conference, 1995, pp. 353–357
ElMaraghy, H.A., Gu, P.H., Bollinger, J.G., Expert System for Inspection Planning, CIRP Ann. Manuf. Technol. 36, 85–89 (1987) CrossRefGoogle Scholar
T.-S. Shen, J. Huang C.-H. Menq, Multiple-sensor integration for rapid and high-precision coordinate metrology, Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics, September 19–23, Atlanta, USA, 1999
M. Nashman, B. Yoshimi, T.H. Hong, W.G. Rippey, M. Herman, A Unique Sensor Fusion System for Coordinate Measuring Machine Tasks, in Proceedings of the SPIE International Symposium on Intelligent Systems and Advanced Manufacturing, Session: Sensor Fusion and Decentralized Control in Autonomous Robotic Systems, Pittsburg, USA, 1997, pp. 145–156
Schulz, M., Gerhardt, J., Geckeler, R.D., Elster, C., Traceable multiple sensor system for absolute form measurement, Proc. SPIE 5878, 84–91 (2005) Google Scholar
Chan, V.H., Bradley, C., Vickers, G.W., A multi-sensor approach for rapid digitization and data segmentation in reverse engineering, J. Manuf. Sci. Eng. 122, 725–733 (2000) CrossRefGoogle Scholar
Yuhong, Q., Lei, W., Lusheng, X., Yuanqing, H., Vision Guided Automatically Measuring in Coordinate Metrology, Proc. SPIE 7130, 1–6 (2008) Google Scholar
F. Li, A.P. Longstaff, S. Fletcher, A. Myers, Integrated tactile and optical measuring systems in 3D metrology, in Proceedings of Queen’s Diamond Jubilee computing and engineering annual researchers’ conference CEARC’ 2012, University of Huddersfield, Huddersfield, pp. 1-6
Weckenmann, A., Jiang, X., Sommer, K.-D., Neuschaefer-Rube, U., Seewig, J., Shaw, L., Estler, T., Multisensor data fusion in dimensional metrology, CIRP Ann. Manuf. Technol. 58, 701–721 (2009) CrossRefGoogle Scholar
Y. Hu, Q. Yang, P. Wei, Development of a novel virtual Coordinate Measuring Machine, in I2MTC- International Instrumentation and Measurement Technology Conference, Singapore, 5–7 May, 2009
Van Dorp, B., Haitjema, H., Delbressine, F., Bergmans, R., Schellekens, P., Virtual CMM using Monte Carlo methods based on frequency content of the error signal, Proc. SPIE 4401, 158–167 (2001) CrossRefGoogle Scholar
Yang, Z., Chen, Y., Inspection Path Generation in Haptic Virtual CMM, Computer-Aided Design & Applications 2, 273–282 (2005) CrossRefGoogle Scholar
Y. Wang, Y. Chen, Z. Nan, Y. Hu, Accessibility analysis for CMM inspection planning using haptic device, IEEE International Conference on Robotics and Biomimetics, China, 2006, pp. 1239–1243
Y. Hu, Q. Yang, X. Sun, Development and experimental validation of an Advanced Virtual Coordinate Measuring Machine, in Instrumentation and Measurement Technology Conference (I2MTC), IEEE 2011, Brunel University, UK, pp. 1–5
Tadahiko, S., Akira, S., Kaiji, S., Shinichiro, H., Wang, B.-C., Cheng, Y., Virtual Coordinate Measuring Machine - Evaluation of Dynamic Errors Caused by Inertial and Driving Forces, Nihon Kikai Gakkai Nenji Taikai Koen Ronbunshu 2, 181–182 (2000) Google Scholar
Pahk, H.J., Burdekin, M., Peggs, G.N., Development of virtual coordinate measuring machines incorporating probe errors, Proc. Institut. Mech. Eng. B: J. Eng. Manuf. 212, 533–548 (1998) CrossRefGoogle Scholar