Highly performing adaptive optical systems are required for nextgeneration giant telescopes as well as next generationinstrumentation for 10 m-class telescopes. Different types of AOsystems are currently under study, including Multi-Conjugate AO(MCAO), high dynamic range AO, and low-order AO for distributedpartial correction AO. These systems require a large variety ofdeformable mirrors with very challenging parameters. Thedevelopment of new technologies based onmicro-opto-electro-mechanical systems (MOEMS) is promising forfuture deformable mirrors. We are currently developing a MDM basedon an array of electrostatic actuators with attachments to acontinuous mirror on top. The most challenging building block forthis device is the high optical quality mirror. Our first resultsshow a very efficient planarization of the surface with ourdesign. The integration of this mirror surface on top of anactuator array is under investigation.