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X-ray Fourier transform holography using separated holography-mask
Published online by Cambridge University Press: 01 November 2010
Abstract
We studied X-ray Fourier transform holography using separated holography-mask and sample geometry. The method was successfully applied to the imaging of the magnetic nanostructure using soft X-ray in addition to the cross-sectional imaging of Cu interconnect lines using hard X-ray.
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- Copyright © Diamond Light Source Ltd 2010