Hostname: page-component-745bb68f8f-cphqk Total loading time: 0 Render date: 2025-02-11T16:15:14.648Z Has data issue: false hasContentIssue false
  • English
  • Français

Thermal effects in precision systems: Design considerations, modelling, compensation and validation techniques

Published online by Cambridge University Press:  27 April 2011

T. A. M. Ruijl
T. A. M. Ruijl*
Affiliation:
MI-partner: Partners in Mechatronic Innovation, Dillenburgstraat 9N, 5652 AM Eindhoven, The Netherlands
*
†Email address for correspondence: [email protected]
Get access

Abstract

In common high-end precision systems, thermal effects, in general, play a very important role with respect to the final performance of the system. Mainly driven by miniaturization, performance and reliability enhancement, the requirements of these systems have enormously increased over the last few decades. To stimulate exchange of knowledge and cooperation in the precision engineering community a special interest group was initiated by the Euspen. During a meeting in 2006 it turned out that thermal effects occur in many different applications and in all forms. The complexity of the thermal effects and the high impact on the performance of systems motivated the group to organize a conference in 2007. All kinds of applications were mentioned, starting from traditional machine tools up to next-generation lithography tools and analysis tools. The huge diversity of the thermal issues in all kinds of market segments was also very clearly discussed.

Type
Contributed paper
Information
Diamond Light Source Proceedings , Volume 1 , Issue MEDSI-6 , October 2010 , e60
Copyright
Copyright © Diamond Light Source Ltd 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Box, S. 2006 Ontwerp en Temperatuur Regeling voor Nanometer Precisie. Mikroniek (In Dutch).Google Scholar
Bryan, J. B. 1990 International status of thermal error research. CIRP Annals 39/2.CrossRefGoogle Scholar
Evans, C. 1989 Precision Engineering: An Evolutionary View. Cranfield Press.Google Scholar
Flügge, J. 2006 Multichannel temperature measurement systems for thermocouples. Euspen SIG Seminar, Eindhoven, The Netherlands.Google Scholar
Koevoets, A. H., Eggink, H. J., van der Sanden, J., Dekkers, J. & Ruijl, T. A. M. 2007 Optimal sensor configuring techniques for the compensation of thermo-elastic deformations in high-precision systems. In Proceedings Therminics, Budapest, Hungary.Google Scholar
Ruijl, T. A. M. 2001 Ultra Precision Coordinate Measuring Machine; Design, Calibration and Error Compensation. Ph.D. Thesis, Delft University of Technology, ISBN 90-6464-287-7.Google Scholar
Ruijl, T. A. M. 2006. Compensation model based on thermal mode shape. In Euspen SIG Seminar 2006, Eindhoven, The Netherlands.Google Scholar
Sanden, vd. J. 2007. Proceedings of the 1st Euspen SIG Conference on Thermal Effects in Precision Systems, Maastricht, The Netherlands.Google Scholar
Slocum, A. H. 1992 Precision Machine Design. Prentice Hall, New Jersey, ISBN 0-13-690918-3.Google Scholar
Uriarte, L. & Zatarain, M. 2006 Thermal modal analysis and the compensation of thermal distortions. In Euspen SIG Seminar 2006, Eindhoven, The Netherlands.Google Scholar