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Published online by Cambridge University Press: 21 October 2010
A novel mirror bender system utilizing cam-shaft mover (CSM) with 100 µm eccentricity was designed and successfully tested. The system was initially tested and characterized in the laboratory, and then later the performance was verified using the Advanced Photon Source synchrotron radiation source. The force from the two separate CSMs is translated to both ends of a mirror through a small-diameter bellows feed-through. The system uses an internal spring assembly to compensate for atmospheric pressure. A compact gear box with 10:1 ratio between the stepper motor and cam shaft is used to increase the precision of the bender system. This bender system is equipped with a precise rotary potentiometer and load cell for feedback. A system resolution better than 0.2 µm per step was achieved. This bender system was designed as a separate unit, is very compact and can be used to bend a mirror in both the vertical and horizontal planes. Details of the system design, changes made from the prototype system to the production unit and test results are presented here.