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Active vibration isolation of high precision machines

Published online by Cambridge University Press:  27 September 2010

C. Collette ,
S. Janssens ,
K. Artoos  and
C. Hauviller
C. Collette*
Affiliation:
European Organization for Nuclear Research CH-1211 Geneva 23, Switzerland
S. Janssens
Affiliation:
European Organization for Nuclear Research CH-1211 Geneva 23, Switzerland
K. Artoos
Affiliation:
European Organization for Nuclear Research CH-1211 Geneva 23, Switzerland
C. Hauviller
Affiliation:
European Organization for Nuclear Research CH-1211 Geneva 23, Switzerland
*
†Email address for correspondence: [email protected]
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Abstract

This paper provides a review of active control strategies used to isolate high-precisionmachines (e.g. telescopes, particle colliders, interferometers, lithography machines or atomic force microscopes) from external disturbances. The objective of this review is to provide tools to develop the best strategy for a given application. Firstly, the main strategies are presented and compared, using single degree of freedom models. Secondly, the case of huge structures constituted of a large number of elements, like particle colliders or segmented telescopes, is considered.

Type
Contributed paper
Information
Diamond Light Source Proceedings , Volume 1 , Issue MEDSI-6 , October 2010 , e1
Copyright
Copyright © Diamond Light Source Ltd 2010

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References

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