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X-ray Topography of Surface Layers and Epitaxial Films
Published online by Cambridge University Press: 06 March 2019
Abstract
The techniques of X-ray topography are reviewed, with special reference to their application to the study of surface layers and thin films. The methods of section topography, white radiation topography and double and triple crystal topography are shown to be the most appropriate, with grazing or glancing incidence methods assuming special importance. Applications to the questions of epilayer mismatch and dislocation content, process-induced defects and surface damage are discussed.
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- Copyright © International Centre for Diffraction Data 1989
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