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Theoretical Formulas for Film Thickness Measurement by Means of Fluorescence X-Rays

Published online by Cambridge University Press:  06 March 2019

Toshio Shiraiwa  and
Nobukatsu Fujino
Toshio Shiraiwa
Affiliation:
Central Research Laboratories, Sumitomo Metal Ind. Amagasaki, Japan
Nobukatsu Fujino
Affiliation:
Central Research Laboratories, Sumitomo Metal Ind. Amagasaki, Japan
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Abstract

The fluorescence x-ray method of the coating thickness measurement is theoretically studied. The theoretical formulas of the fluorescence x-ray intensity from the coating and from the substrate are obtained which include the enhancement effect between the coating and the substrate. The formulas are applied to the following examples and are confirmed experimentally: zinc on steel; tin on steel; aluminum on steel and on PMMA. The experimental results agree well with the theoretical results.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 12: Seventeenth Annual Conference on Applications of X-ray Analysis, August 21-23, 1968 , 1968 , pp. 446 - 456
Copyright
Copyright © International Centre for Diffraction Data 1968

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References

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