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A Study of X-Ray Fluorescence Method with Vacuum and Air-Path Spectrographs for the Determination of Film Thicknesses of II-VI Compounds

Published online by Cambridge University Press:  06 March 2019

Frank L. Chan*
Affiliation:
Aerospace Research Laboratories Wright-Patterson Air Force Base, Ohio
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Abstract

Films of II-VI compounds have been prepared by vacuum technique for the determination of their thicknesses. Some difficulties have been experienced in preparing good quality films- The positron of the substrate in the vacuum chamber, the rate of deposition, and the temperature of sublimation are some of the factors influencing the quality of these films. For instance, films of cadmium sulfide could be prepared in the usual yellow or orange color or in colors ranging from brown to black, depending on the conditions enumerated. For energy conversion, a film of proper thickness is one of the requirements for aerospace application. Among the various methods used for the determination of the thickness of these films, X-ray fluorescence can be performed rapidly and nondestructively. After determination of thickness by the X-ray fluorescence method, the samples can be used for other determinations and for energy conversion without their efficiency's having been affected. Other physical and chemical methods have been worked out. Comparison of these methods with the X-ray fluorescence method is made. Procedures and results are presented.

Type
Research Article
Copyright
Copyright © International Centre for Diffraction Data 1967

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References

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