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Reciprocal Space Mapping of Epitaxial Materials Using Position-Sensitive X-ray Detection

Published online by Cambridge University Press:  06 March 2019

S. R. Lee ,
B. L. Doyle ,
T. J. Drummond ,
J. W. Medernach  and
P. Schneider Jr.
S. R. Lee
Affiliation:
Sandia National Laboratories Albuquerque, NM, 87185-1056
B. L. Doyle
Affiliation:
Sandia National Laboratories Albuquerque, NM, 87185-1056
T. J. Drummond
Affiliation:
Sandia National Laboratories Albuquerque, NM, 87185-1056
J. W. Medernach
Affiliation:
Sandia National Laboratories Albuquerque, NM, 87185-1056
P. Schneider Jr.
Affiliation:
Sandia National Laboratories Albuquerque, NM, 87185-1056
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Abstract

Reciprocal space mapping can be efficiently carried out using a position-sensitive x-ray detector (PSD) coupled to a traditional double-axis diffractometer. The PSD offers parallel measurement of the total scattering angle of all diffracted x-rays during a single rocking-curve scan. As a result, a two-dimensional reciprocal space map can be made in a very short time similar to that of a one-dimensional rocking-curve scan. Fast, efficient reciprocal space mapping offers numerous routine advantages to the x-ray diffraction analyst. Some of these advantages arc the explicit differentiation of lattice strain from crystal orientation effects in strain-relaxed heteroepitaxial layers; the nondestructive characterization of the size, shape and orientation of nanocrystalline domains in ordered-alloy epilayers; and the ability to measure the average size and shape of voids in porous epilayers. Here, the PSD-based diffractometer is described, and specific examples clearly illustrating the advantages of complete reciprocal space analysis are presented.

Type
III. Applications of Diffraction to Semiconductors and Films
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 201 - 213
Copyright
Copyright © International Centre for Diffraction Data 1994

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