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Precise Cell Parameters of Semiconductor Crystals and their Applications
Published online by Cambridge University Press: 06 March 2019
Abstract
A precise method for detenaining unit cell dimensions of semiconductor single crystals has been developed. An accuracy of ± 0.00002 Å and a precision of ± 0.00001 Å is achieved.
The method is used to determine variations in the cell parameter of GaAs as a function of surface defects, homogeneity across and along an ingot, evaluation of epitaxial layers, effects of heat treatments and structure defects induced by oxide diffusion masks on a substrate. The application of the technique to GaAsP alloys permit accurate and rapid study of sample composition and homogeneity.
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- Research Article
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- Copyright © International Centre for Diffraction Data 1968
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