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Multi-Layer XRF Calculations

Published online by Cambridge University Press:  06 March 2019

M. Sumini
Affiliation:
Laboratorio di Ingegneria Nucleare di Montecuccolino University of Bologna Via dei Colli 16, 40136 Bologna, ITALY
J.E. Fernández
Affiliation:
Laboratorio di Ingegneria Nucleare di Montecuccolino University of Bologna Via dei Colli 16, 40136 Bologna, ITALY
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Abstract

An analytical framework for calculation of multiple scattering intensities emitted by a multi-layer sample are obtained with transport theory. The n-th order Flux solution of the Boltzsiann transport equation renders the iterative solution for multi-layers samples of thin or infinite thickness.

The first-order intensity is written for a generic sample with I layers and for the predominating interactions in the X-ray regime: the photoelectric effect, and the Compton and the Rayleigh scattering. As an example, the case of a thin deposit on an infinite thickness substrate is discussed.

Type
XI. Thin-Film and Surface Characterization by XRS and XPS
Copyright
Copyright © International Centre for Diffraction Data 1991

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References

1. Fernández, J. E. and Molinari, V. G., X-Ray photon spectroscopy calculations, in: “Advances in Nuclear Science and Technology,” Vol 22, M. Becker and J. Lewins, eds., Plenum Press, New York (1991).Google Scholar
2. Fernández, J. E. and Sumini, M., SHAPE: a computer simulation of energy dispersive X-Ray spectra, X-Ray Spectrom. (1991), to be published.10.1002/xrs.1300200612Google Scholar