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Multi-Layer XRF Calculations
Published online by Cambridge University Press: 06 March 2019
Abstract
An analytical framework for calculation of multiple scattering intensities emitted by a multi-layer sample are obtained with transport theory. The n-th order Flux solution of the Boltzsiann transport equation renders the iterative solution for multi-layers samples of thin or infinite thickness.
The first-order intensity is written for a generic sample with I layers and for the predominating interactions in the X-ray regime: the photoelectric effect, and the Compton and the Rayleigh scattering. As an example, the case of a thin deposit on an infinite thickness substrate is discussed.
- Type
- XI. Thin-Film and Surface Characterization by XRS and XPS
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- Copyright © International Centre for Diffraction Data 1991