Hostname: page-component-cd9895bd7-q99xh Total loading time: 0 Render date: 2024-12-25T01:36:41.905Z Has data issue: false hasContentIssue false

Dynamical X-Ray Diffraction Simulations for Asymmetric Reflections for III-V Semiconductors Multilayers

Published online by Cambridge University Press:  06 March 2019

A. T. Macrander
Affiliation:
AT&T Bell Laboratories Murray Hill, New Jersey 07974
D. W. Berreman
Affiliation:
AT&T Bell Laboratories Murray Hill, New Jersey 07974
S. E. G. Slushy
Affiliation:
AT&T Bell Laboratories Murray Hill, New Jersey 07974
Get access

Extract

A new matrix representation of the dynamical theory of x–ray diffraction which treats asymmetric reflections of coherent (i.e., pseudomorphic) epitaxial single crystal structures has been applied to III–V semiconductor multilayer structures. The laminar approximation is made, and Maxwell‘s equations are integrated in a 8 x 8 matrix form for the sublayers. Diffraction profiles from any multilayer can be obtained by multiplying the sublayer matrices. The method was used to simulate on a computer the intrinsic reflecting power of hypothetical structures in order to probe theoretical sensitivity limits for thin layers. We investigated [100] oriented structures consisting of single In ( l–x )Ga (x)As(l–y)P(y) quaternary (Q) layers on InP substrates as well as double heterostructures (DH‘s) consisting of a thin Q layer sandwiched between an InP substrate and an InP cladding layer.

Type
II. Characterization of Thin Films by XRD and XRF
Copyright
Copyright © International Centre for Diffraction Data 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Berreman, D. W. and Macrander, A. T., “Asymmetric X- ray Diffraction by Strained Crystal Wafers: 8 x 8 Ma trix Dynamical Theory” , to be published.Google Scholar
[2] Matsui, J., Onabe, K., Kamejima, T., and Hayashi, I., “ Lattice Mismatch Study of LPE-grown InGaPAs on (OOl)-InP Using X- ray Double-Crystal Diffraction” , J. Electrochem. Soc. 126, 664 (1979),Google Scholar
[3] Bartels, W.J., “Characterization of thin layers on perfect crystals with a multipurpose high resolution x-ray diffractometer” , J. Vac. S d. Technol. Bl ,338 (1983).Google Scholar
[4] Macrander, A.T. and K. Strege, “ X- ray double crystal characterization of highly perfect InGaAs/InP grown by vapor-phase epitaxy” , J. Appl. Phys. 59, 442 (1986).Google Scholar