Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-27T06:33:31.986Z Has data issue: false hasContentIssue false
  • English
  • Français

Determination of Ultra-Thin Carbon Coating Thickness by X-ray Fluorescence Technique

Published online by Cambridge University Press:  06 March 2019

R. L. White  and
T. C. Huang
R. L. White
Affiliation:
IBM General Products Division San Jose, CA 95193
T. C. Huang
Affiliation:
IBM Research Division Alma den Research Center San Jose, CA 95120
Get access

Abstract

A tcchniquc for high-precision measurement of carbon thin-film thickness using X-ray fluorescence (XRF) is described. A quadratic calibration procedure is used for carbon thin films on silicon. Measurement of carbon-film thickness in a double-layer structure of carbon and CoCrX alloy is complicated by interference effects from the underlying layer. The dependence of the relative precision in measuring thickness (σT/T) on the counting time has been derived. It shows that a precision of 2% for a 25-nm carbon coating can be obtained using a W/C crystal and counting time of 4 minutes. Intensity and resolution advantages provided by the recently developed Ni/C and V/C multilayer synthetic crystals are also described.

Type
VI. Analysis of Thin Films by XRD and XRF
Information
Advances in X-Ray Analysis , Volume 32: Thirty-Seventh Annual Conference on Applications of X-ray Analysis, August 1-5, 1988 , 1988 , pp. 331 - 339
Copyright
Copyright © International Centre for Diffraction Data 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Cullity, B. D. , Elements of X-Ray Diffraction, 2nd ed. (Reading, Mass. : Addison-Wesley, 1978).Google Scholar
2. Huang, T.C. , Thin Solid Films, 157, 283 (1988); and references therein.Google Scholar
3. Nicolosi, J.A. , Groven, J.P. , and Merlo, D. , Adv. X-Ray Anal. , 30, 183 (1987).Google Scholar
4. Arai, T. , Adv. X-Ray Anal, 30, 213(1987).Google Scholar