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Characterization of TiN Film by XRD and XRF

Published online by Cambridge University Press:  06 March 2019

G. Kimmel ,
L. Politi  and
T. Wieder
G. Kimmel
Affiliation:
NRCN, P.O.Box 9001, Beer Sheva 84190, Israel Ben GurionUniversity of the Negev, Beer Sheva, Israel
L. Politi
Affiliation:
Ben GurionUniversity of the Negev, Beer Sheva, Israel
T. Wieder
Affiliation:
FH Furtwangen, 11 T, VS-Schwenningen, Germany
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Extract

TiAIN is a protective coating for cutting and reshaping tools, since it reduces wear, increases the cutting velocity of cutting tools, and increases the lifetime of reshaping tools. Thus many investigators studied the structure and properties of thin TiN films1-6. Due to the complicated geometry of the tools, the coating thickness may vary at different locations on a tool. For quality assurance thickness measurements are necessary. In this work-as a first step-only a simple geometry was considered.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 37: Forty-Second Annual Conference on Applications of X-ray Analysis, August 2-6, 1993 , 1993 , pp. 175 - 182
Copyright
Copyright © International Centre for Diffraction Data 1993

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References

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